{"entities":{"Q1016932":{"pageid":1018780,"ns":120,"title":"Item:Q1016932","lastrevid":50656238,"modified":"2026-01-14T17:13:15Z","type":"item","id":"Q1016932","labels":{"en":{"language":"en","value":"Modeling and modification of the parallel plate variable MEMS capacitors considering deformation issue"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 5554124"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1016932$AFDB180E-5751-4D9B-9384-3B3D45C32BAE","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"3e0f79505e6f8411e087d6cbad7cbbf7a2e9a78f","datavalue":{"value":{"text":"Modeling and modification of the parallel plate variable MEMS capacitors considering deformation issue","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q1016932$26E9C6BB-8E89-498B-A12E-626D814D1267","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"d75d3b82370cdd33f110fbd55d0e9e875bd19896","datavalue":{"value":"1161.74026","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1016932$482E81EB-BFA1-4BF3-9832-60704B253C07","rank":"normal"}],"P16":[{"mainsnak":{"snaktype":"value","property":"P16","hash":"021e3c12e2e2150c84f4e22ad66d617f35920487","datavalue":{"value":{"entity-type":"item","numeric-id":1016930,"id":"Q1016930"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1016932$2BA54AE8-9263-49C8-BC3F-58200FD7C0D0","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"da9c5e6129f11f689d1c16f279f657d592701c9c","datavalue":{"value":{"entity-type":"item","numeric-id":1016931,"id":"Q1016931"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1016932$109BB042-9AA2-4148-B0F4-A49C2DB1F09D","rank":"normal"}],"P200":[{"mainsnak":{"snaktype":"value","property":"P200","hash":"b54abea66bedd9716daf14bcb7a3f7fc0416c247","datavalue":{"value":{"entity-type":"item","numeric-id":129633,"id":"Q129633"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1016932$816BAE4B-2E1F-46F0-B59A-F024A6E98805","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"8bedaf8fe10cb38bd77da22583c1b0218fa9e9eb","datavalue":{"value":{"time":"+2009-05-14T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q1016932$ABF53A6E-00BB-4F4A-B7AA-A9EA418EE6DA","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"dabd1caf0a41fb6b96164127b6097eac8dd3a121","datavalue":{"value":"74F15","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1016932$04E04CFD-F4A3-4D29-9268-36B9F3EAB35C","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"f5e636faf68095c82529de63da2e347a926072da","datavalue":{"value":"78A55","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1016932$70C4B4D5-BB47-40B8-8270-FF82478A6432","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"c6822f6610fb61bd7de6da44221900721c19f73a","datavalue":{"value":"5554124","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1016932$E058CE51-AE5B-441C-99DE-83C1C8636AC2","rank":"normal"}],"P1450":[{"mainsnak":{"snaktype":"value","property":"P1450","hash":"59d2a9dddedf6316a6a6bc6e7d35dcf7a6f3e041","datavalue":{"value":"pull-in voltage","type":"string"},"datatype":"string"},"type":"statement","id":"Q1016932$4244E35E-2CA6-49C4-9322-9D65F3134137","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"3bba34bfe86e57d21c8d17a9f038c4f85c2c006c","datavalue":{"value":"deflection","type":"string"},"datatype":"string"},"type":"statement","id":"Q1016932$C5D15052-4A84-428A-B88F-33716F009947","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"de5a8203a234ace57501896aef70c287745c4c33","datavalue":{"value":"electrostatic force","type":"string"},"datatype":"string"},"type":"statement","id":"Q1016932$558E6182-C63D-4537-8966-2EDCFB52441E","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1016932$C14BF704-4779-45EA-A55C-6748D9814ACF","rank":"normal"}],"P205":[{"mainsnak":{"snaktype":"value","property":"P205","hash":"6ee0fc3fce06c47b181bd3f4e43a769cda39211a","datavalue":{"value":"https://doi.org/10.1016/j.mechmachtheory.2008.12.006","type":"string"},"datatype":"url"},"type":"statement","id":"Q1016932$95999EF2-3D80-42CC-9A68-B026FEBC0E34","rank":"normal"}],"P388":[{"mainsnak":{"snaktype":"value","property":"P388","hash":"f212c10accd33d88026342e9bf336d171cbd0f57","datavalue":{"value":"W2028441526","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1016932$F28BFBA8-32F3-4160-B69C-4B02EF96E1A6","rank":"normal"}],"P223":[{"mainsnak":{"snaktype":"value","property":"P223","hash":"f323b82ecb2a9b529680854b2e59be61ec775b45","datavalue":{"value":{"entity-type":"item","numeric-id":5327557,"id":"Q5327557"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1016932$CB624174-F382-40E6-8F00-C410A012B408","rank":"normal"}],"P27":[{"mainsnak":{"snaktype":"value","property":"P27","hash":"4d12a1be4af4e13b9235ccd98ef2cc79ab1951e3","datavalue":{"value":"10.1016/J.MECHMACHTHEORY.2008.12.006","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1016932$F6E94CD5-3E0C-441D-B663-74EFF52C13D4","rank":"normal"}],"P1643":[{"mainsnak":{"snaktype":"value","property":"P1643","hash":"771804ff0e36130133b3ad2f7d332292cf198d19","datavalue":{"value":{"entity-type":"item","numeric-id":4822956,"id":"Q4822956"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"d23c109d537229683924a3183d72be641fc824dd","datavalue":{"value":{"amount":"+0.7117550373077393","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1016932$42E03D27-9438-4FEA-91F5-9881BE0B4EAF","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"c05b5766aa9a9aeef50b5640ea6e485c25a837de","datavalue":{"value":{"entity-type":"item","numeric-id":3508813,"id":"Q3508813"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"b688bed2ae9258fa38120176bc2d20a1c9e916a9","datavalue":{"value":{"amount":"+0.7071347236633301","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1016932$EC7C5BED-90EC-413F-87F6-A93F29717B5F","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"2e054f3f4d33eaa2471d1cf72785bd7b4a86a323","datavalue":{"value":{"entity-type":"item","numeric-id":5056745,"id":"Q5056745"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"d10df8c80564663bd81770a421ab2e78f379fab7","datavalue":{"value":{"amount":"+0.682155966758728","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1016932$45D61433-94F7-4F8A-AC02-D17917696F8B","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"9ccf243dbc6c6de87d5107b020ece7d6924b0493","datavalue":{"value":{"entity-type":"item","numeric-id":986238,"id":"Q986238"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"46058e8378d0d70b810c4cf9f3c8afe694af90bc","datavalue":{"value":{"amount":"+0.6752901673316956","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1016932$06B930F6-58E5-46EC-90F8-AD20D7F904A5","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"334d99e5974e577e6f27596882172ae02129d313","datavalue":{"value":{"entity-type":"item","numeric-id":1625068,"id":"Q1625068"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"5cff98009b673afa657bba6952ab60acc503b3fa","datavalue":{"value":{"amount":"+0.6552892923355103","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1016932$232578F5-58B1-4BF1-9536-FA0D9DCCE735","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Publication:1016932","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Publication:1016932"}}}}}