{"entities":{"Q1045439":{"pageid":1047287,"ns":120,"title":"Item:Q1045439","lastrevid":50853752,"modified":"2026-01-15T10:43:18Z","type":"item","id":"Q1045439","labels":{"en":{"language":"en","value":"Design of a control system for a macro-micro dual-drive high acceleration high precision positioning stage for IC packaging"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 5648340"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1045439$23A0AF46-2C9A-40B5-BB38-5FB201C3F425","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"cbe22dedb4b9dce9c8c71fc048f7697d4a69a375","datavalue":{"value":{"text":"Design of a control system for a macro-micro dual-drive high acceleration high precision positioning stage for IC packaging","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q1045439$7FCC8137-04B0-42A5-A321-554A35A2BBF3","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"a3d88590d53c2aefbbd7df2fee62f6fbb8ecad41","datavalue":{"value":"1422.70014","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1045439$6B8F1710-CE05-48A3-AECE-E94E8F4F585A","rank":"normal"}],"P16":[{"mainsnak":{"snaktype":"value","property":"P16","hash":"d74a398002bc75ed5b4f46fb09dcd1abb4ce7043","datavalue":{"value":{"entity-type":"item","numeric-id":1045438,"id":"Q1045438"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1045439$DA3A6511-07C3-4220-AC81-5DEDD192A634","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"9b614c6185b64635f39ce8b8d23004b2b85ecb05","datavalue":{"value":{"entity-type":"item","numeric-id":460448,"id":"Q460448"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1045439$9B5816E3-3A6E-4B9E-89C5-7E65889B86E5","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"9d9de401a6457d06b773555289f591deaa5f03d3","datavalue":{"value":{"entity-type":"item","numeric-id":1024008,"id":"Q1024008"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1045439$4DD77175-93FC-4A6F-8E02-50E255B89407","rank":"normal"}],"P200":[{"mainsnak":{"snaktype":"value","property":"P200","hash":"1c21b4cba3723fb37014155e6ce2dbe8cee77c53","datavalue":{"value":{"entity-type":"item","numeric-id":163214,"id":"Q163214"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1045439$E8D74570-EC73-400C-96C2-C3985F5252C5","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"9d265d400060d2e7fb9c5c45adc5a5c7f5f7bbd7","datavalue":{"value":{"time":"+2009-12-15T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q1045439$81928061-CF6C-44C7-9A0B-5EFE2DAE9249","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"15ea9b09fbfd690056ed7c63f44b6185fbeb792f","datavalue":{"value":"70Q05","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1045439$C35AA6B7-AAFD-4127-A9EA-E2BC887435A8","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"c5408ffa34731028dac8aa7abec8a3b9626903f0","datavalue":{"value":"70E60","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1045439$27E73636-2AA3-4A8D-B429-4952B015BFD3","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"9d206e18a4b6fab8d01af90e25f1622b69f30f4d","datavalue":{"value":"5648340","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1045439$CCDF99C6-6D8A-4FB6-A062-B2CA89738802","rank":"normal"}],"P1450":[{"mainsnak":{"snaktype":"value","property":"P1450","hash":"19070cde309580e8cd0c030338c6929eeb5f0c52","datavalue":{"value":"macro-micro dual-drive","type":"string"},"datatype":"string"},"type":"statement","id":"Q1045439$4D34F310-AC66-49CC-A1B4-49048F0557CD","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"603ac6f040dd7229da8c7017bc0deef16768d4c9","datavalue":{"value":"positioning stage","type":"string"},"datatype":"string"},"type":"statement","id":"Q1045439$3D691F95-0550-4E53-82F6-675435FC0730","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"7e5ec40a7ea1a96fb9c5ea21da09d651924a5eed","datavalue":{"value":"control system","type":"string"},"datatype":"string"},"type":"statement","id":"Q1045439$CB1FF0FD-CEB9-4AB0-95C8-77B456A1DCEA","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"50674aefdb5cd089bdf813ab2ce0925ab7842090","datavalue":{"value":"friction","type":"string"},"datatype":"string"},"type":"statement","id":"Q1045439$89A6CE47-CAB4-4B6D-9177-3955ADCCB8C7","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"cb7495cb1dc39bde75bca5222404ebba7133711f","datavalue":{"value":"LQG","type":"string"},"datatype":"string"},"type":"statement","id":"Q1045439$AB3B2FAE-9F4F-4F36-8590-E4D66FA46A11","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1045439$BABDB20E-8A0F-4360-8E5B-370E13AC8C47","rank":"normal"}],"P205":[{"mainsnak":{"snaktype":"value","property":"P205","hash":"7b90f1ae982d60dd9a4654af6b2b9ba1074f81a3","datavalue":{"value":"https://doi.org/10.1007/s11431-009-0209-y","type":"string"},"datatype":"url"},"type":"statement","id":"Q1045439$D15D72E0-CA9C-4896-85A4-FA483DF2B243","rank":"normal"}],"P388":[{"mainsnak":{"snaktype":"value","property":"P388","hash":"cd8f8f6e14ed98622eb060273d5bbd330355700c","datavalue":{"value":"W2041539629","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1045439$1E8C69EF-52BF-4D2B-9F95-65AC9CC8D7F2","rank":"normal"}],"P223":[{"mainsnak":{"snaktype":"value","property":"P223","hash":"be31a4918e165ab3435f598312f10459906068ad","datavalue":{"value":{"entity-type":"item","numeric-id":4837467,"id":"Q4837467"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1045439$BBBFAFB7-C860-41C4-9E12-AE404901BEDF","rank":"normal"}],"P27":[{"mainsnak":{"snaktype":"value","property":"P27","hash":"9c5473c8e84c375c0678646e81f29d21c802574b","datavalue":{"value":"10.1007/S11431-009-0209-Y","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1045439$9919C910-8C59-4F30-94FE-1777F8F6A48E","rank":"normal"}],"P1643":[{"mainsnak":{"snaktype":"value","property":"P1643","hash":"21f8018c7ff1b5b9d4c0537d86e562feac5e19d5","datavalue":{"value":{"entity-type":"item","numeric-id":1661817,"id":"Q1661817"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"115976b1880b8bf96077eac80ebf2ecf0858d6bc","datavalue":{"value":{"amount":"+0.7373592257499695","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1045439$7543161F-77B1-4DEE-8EA1-1439A6F5718B","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"16ddc35336872cfcfcd43acd9f608dd29137a6b8","datavalue":{"value":{"entity-type":"item","numeric-id":1015061,"id":"Q1015061"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"84db2fe489bb3bcb4555312d89d58c070ce4af15","datavalue":{"value":{"amount":"+0.7074494957923889","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1045439$9DBE62FF-7E25-42C1-BBF3-3D289A6C4DE2","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"99f8a5b75f65a58e0e2f5beab063366572022e49","datavalue":{"value":{"entity-type":"item","numeric-id":5416393,"id":"Q5416393"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"6a1fe7f77f80e22292ebb2654f62879996c49a2d","datavalue":{"value":{"amount":"+0.6980472207069397","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1045439$4D652D50-23D3-4CED-BB75-25E748DE8EE8","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"cf68733516dc27a13d05f942bfb6959b4ad64fc7","datavalue":{"value":{"entity-type":"item","numeric-id":2684639,"id":"Q2684639"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"9e874b73a7adb126998d53e6036aac68de287a6c","datavalue":{"value":{"amount":"+0.6805025339126587","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1045439$AF443F60-69A8-4B50-99A7-902045BAEAB8","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"7fad643efd005b5f79be3e02d951d187d8fa4dac","datavalue":{"value":{"entity-type":"item","numeric-id":3436299,"id":"Q3436299"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"a5cab7e9a24a58e22d1a665b2c46b20ebfe6770d","datavalue":{"value":{"amount":"+0.6788066625595093","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1045439$4990FC1D-EF50-4ADD-9644-085BB1188982","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Publication:1045439","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Publication:1045439"}}}}}