{"entities":{"Q1194767":{"pageid":1205516,"ns":120,"title":"Item:Q1194767","lastrevid":67055769,"modified":"2026-04-12T14:39:25Z","type":"item","id":"Q1194767","labels":{"en":{"language":"en","value":"Optimal partitions for shop floor control in semiconductor wafer fabrication"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 68627"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1194767$76B4D415-62E0-4186-B51A-ADA452BE5C54","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"cd0ea098413f029b7b0f47cc93e2404ec843a533","datavalue":{"value":{"text":"Optimal partitions for shop floor control in semiconductor wafer fabrication","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q1194767$DCBFE308-DD38-4D97-A692-165D36C75EE3","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"26487ad6bcf6b31bf28ff571ad14665a0529dab4","datavalue":{"value":"0775.90215","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1194767$56B0DA28-148F-4E22-93C1-37412842EDEF","rank":"normal"}],"P27":[{"mainsnak":{"snaktype":"value","property":"P27","hash":"9d139b00cd4d11d09c80fae24379825504cf5e6f","datavalue":{"value":"10.1016/0377-2217(92)90143-W","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1194767$788A5C2E-533A-4ABA-BEF6-9EFEC693D50F","rank":"normal"}],"P16":[{"mainsnak":{"snaktype":"value","property":"P16","hash":"4406bbd24b9d57f6d65ca2d6bdc03a626735d34a","datavalue":{"value":{"entity-type":"item","numeric-id":1084776,"id":"Q1084776"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1194767$F58097BC-0419-4A94-B405-BF923BE0DA17","rank":"normal"}],"P200":[{"mainsnak":{"snaktype":"value","property":"P200","hash":"38576f39a6df37711cb397d1408ced7e3814cc6e","datavalue":{"value":{"entity-type":"item","numeric-id":62319,"id":"Q62319"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1194767$C2EB6A74-1806-4073-9CF6-A3F1ABA4DF68","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"2b560524208aa8e371adf124e000cb4432811470","datavalue":{"value":{"time":"+1992-10-11T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q1194767$0188B4E3-AA65-4FFE-907A-72325D074DA8","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"38e213338db24b8f359e8c3fca9e6e9ae655d7ca","datavalue":{"value":"90B30","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1194767$B8E4E59D-4A13-4BB4-8275-502C545F2421","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"b7ffcab9ce53e90c8627cb2c3bb400b94a5f354a","datavalue":{"value":"90B35","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1194767$04F17209-FAD6-487D-822F-E1A5410704D7","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"aa3ca91474fff28e420d9cace433f8447ec799b0","datavalue":{"value":"90C39","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1194767$BC3F8129-239B-4794-B914-F127D828E75B","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"418d4d19aa7c87e33d52e580c9c108a1bc2de096","datavalue":{"value":"90C90","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1194767$1C29D6B1-CC2F-4EA7-B4FC-10A4C0BF1E10","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"1c85b59e756b1fd5f725f8d85e59d71806f8badb","datavalue":{"value":"68627","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1194767$1406469A-3E40-4996-9A44-1209BEA0FAAA","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1194767$92C4BFD2-905E-4D50-9FCB-84EF537524F5","rank":"normal"}],"P223":[{"mainsnak":{"snaktype":"value","property":"P223","hash":"72e82fce1ae2eb0a2c84da2752ee106114085c2d","datavalue":{"value":{"entity-type":"item","numeric-id":3737195,"id":"Q3737195"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1194767$E7E155E5-4379-4395-AEFE-D37CBDA24145","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"7cbad4944f17afff471966f84ddba81383864ae6","datavalue":{"value":{"entity-type":"item","numeric-id":3292045,"id":"Q3292045"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1194767$72F7FA40-156D-4F2B-A0D2-B5C2BA8A8DD7","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"c0f81a612075c3a25dc17eeeb94a2a45198c2ae0","datavalue":{"value":{"entity-type":"item","numeric-id":5331681,"id":"Q5331681"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1194767$3767E0F2-45EE-48BD-A219-60072FCB3091","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"e7628b399640b8b7904eac7b6685e6525d8cc73a","datavalue":{"value":{"entity-type":"item","numeric-id":4162941,"id":"Q4162941"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1194767$13F61E63-8979-4682-8E7D-C014A9C1CF0A","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Optimal partitions for shop floor control in semiconductor wafer fabrication","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Optimal_partitions_for_shop_floor_control_in_semiconductor_wafer_fabrication"}}}}}