{"entities":{"Q1909059":{"pageid":1919801,"ns":120,"title":"Item:Q1909059","lastrevid":69424680,"modified":"2026-04-13T06:54:32Z","type":"item","id":"Q1909059","labels":{"en":{"language":"en","value":"Using liquid chemical etching to manufacture technological structures of minimum size"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 853892"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1909059$9EDC4D35-BE66-426E-AB0C-54AF012D0562","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"e32662ad3626f71958546f7b31748b0706b7a379","datavalue":{"value":{"text":"Using liquid chemical etching to manufacture technological structures of minimum size","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q1909059$66CEC77B-10AF-4B7F-9244-E267956140E9","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"a034eaa4173c725988279cf5920613b0e0b800fc","datavalue":{"value":"0850.92050","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1909059$ED3E2DA9-5163-4D8F-BEAF-1D7D9FC19F35","rank":"normal"}],"P27":[{"mainsnak":{"snaktype":"value","property":"P27","hash":"ff2e3562257d1d586530c56cddaa36a1c21a7625","datavalue":{"value":"10.1007/BF01259480","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1909059$94670617-D3E2-4AB0-BFA3-83E0BAF29C34","rank":"normal"}],"P16":[{"mainsnak":{"snaktype":"value","property":"P16","hash":"ec37de5648541f03e3587b02126d1b2bee8be6f2","datavalue":{"value":{"entity-type":"item","numeric-id":1895058,"id":"Q1895058"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1909059$B3776EA3-A31D-4030-B7EB-065DBADBEE6C","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"3b175522008e395d46696ef8c823e7f0f28ba64f","datavalue":{"value":{"entity-type":"item","numeric-id":1895059,"id":"Q1895059"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1909059$68973F16-EA1D-436A-BFA5-E68C9810CCBA","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"2de9758706a9ae7df906dc1c5b6280860e227b71","datavalue":{"value":{"entity-type":"item","numeric-id":1909054,"id":"Q1909054"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1909059$F3516956-385C-4A4D-858D-F65A4477A964","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"e49c7bf28294bb75f92172f51b8b822365b8874d","datavalue":{"value":{"entity-type":"item","numeric-id":1175801,"id":"Q1175801"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1909059$B2088DD4-112B-410C-829D-D0B967587599","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"9789657e9302c8e9dbcdf9979511469d4ad5f85f","datavalue":{"value":{"entity-type":"item","numeric-id":684738,"id":"Q684738"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1909059$779BC54D-BF22-4ABD-BC13-FBB22B34D159","rank":"normal"}],"P200":[{"mainsnak":{"snaktype":"value","property":"P200","hash":"17c447c8e76a3a0e73a2c70a024d9ee2f8256c04","datavalue":{"value":{"entity-type":"item","numeric-id":195577,"id":"Q195577"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1909059$CE3AA0C0-BAA1-4A33-8861-06C519A8E060","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"db62fb9fa162673ff7bb617e9fdad5af9e4632d5","datavalue":{"value":{"time":"+1996-03-17T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q1909059$DBB2F761-11D7-4C9D-90B8-D77469635995","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"a0401b536e7fb40315b94c06d6e995ad118c1cfc","datavalue":{"value":"92E20","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1909059$03D09EBA-1381-4040-8917-A83DFB27665D","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"f5e636faf68095c82529de63da2e347a926072da","datavalue":{"value":"78A55","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1909059$2AFDA4DC-0690-4E0C-A762-BD27BF0DC0A0","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"da315977d26345f04989e94267b45ca7cf5997b5","datavalue":{"value":"853892","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1909059$81571070-8D7E-4B2F-9546-34CA4F751B60","rank":"normal"}],"P1450":[{"mainsnak":{"snaktype":"value","property":"P1450","hash":"499f3b35cc36826a28ab085470ab523ca21fff12","datavalue":{"value":"electric field","type":"string"},"datatype":"string"},"type":"statement","id":"Q1909059$0635D591-8BFE-4BB4-AE4D-D172348EBA4A","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"93f89a6ec3f01c2a0d5c26fd08c028567ecb5b92","datavalue":{"value":"etching liquid","type":"string"},"datatype":"string"},"type":"statement","id":"Q1909059$B52E6487-E0AC-49A9-9476-F955AACC935F","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"e5b0e1bd3be9a28cab07834b93f97870efc06367","datavalue":{"value":"manufacturing \\(LSI\\) components","type":"string"},"datatype":"string"},"type":"statement","id":"Q1909059$B80FF162-6196-44C0-85C1-AAFB7F093466","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1909059$AACA8874-E8ED-4F64-9CC7-D066126DD60E","rank":"normal"}],"P223":[{"mainsnak":{"snaktype":"value","property":"P223","hash":"73a518dd161a376048f92cf0e5b89c3f4f7fac79","datavalue":{"value":{"entity-type":"item","numeric-id":5731719,"id":"Q5731719"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1909059$57135577-2BFD-49AB-B17D-6B7E55BB130A","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Using liquid chemical etching to manufacture technological structures of minimum size","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Using_liquid_chemical_etching_to_manufacture_technological_structures_of_minimum_size"}}}}}