{"entities":{"Q1972952":{"pageid":1983694,"ns":120,"title":"Item:Q1972952","lastrevid":46917228,"modified":"2025-12-25T20:41:43Z","type":"item","id":"Q1972952","labels":{"en":{"language":"en","value":"Optimization of the inlet velocity profile for uniform epitaxial growth in a vertical metalorganic chemical vapor deposition reactor"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 1436717"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1972952$2C9C9499-C28E-4580-96E5-741A6E3DB816","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"77c24e671318ec98df3d2e9c79fe9ae1e9b86444","datavalue":{"value":{"text":"Optimization of the inlet velocity profile for uniform epitaxial growth in a vertical metalorganic chemical vapor deposition reactor","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q1972952$90BD6EF9-0A21-4A98-AFE9-D6077DEC6F66","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"0493946995f137f3fe14ebd61b05fe2fe65f63d4","datavalue":{"value":"0977.76093","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1972952$C770F93F-7F9F-4E12-932D-381D3E6EA631","rank":"normal"}],"P27":[{"mainsnak":{"snaktype":"value","property":"P27","hash":"a040f730966fc628c2df4d561adb9335884e9ae2","datavalue":{"value":"10.1016/S0017-9310(99)00085-X","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1972952$94E3DBE9-86AC-43B5-9606-D7DF2EFDBC22","rank":"normal"}],"P16":[{"mainsnak":{"snaktype":"value","property":"P16","hash":"cc45e6b9322bed7360e4aac2a42f8c73614b44f3","datavalue":{"value":{"entity-type":"item","numeric-id":1787138,"id":"Q1787138"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1972952$F68489BA-F3D4-4614-80E8-595126345EF7","rank":"normal"}],"P200":[{"mainsnak":{"snaktype":"value","property":"P200","hash":"4e448eb404c25c9080da91e0abfb6b589f67144f","datavalue":{"value":{"entity-type":"item","numeric-id":172654,"id":"Q172654"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1972952$AEA8E032-6C85-46AB-8225-159C1102D21D","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"c95f8cfd0a0684bac364be781d50fcf02036866b","datavalue":{"value":{"time":"+2001-02-20T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q1972952$B6F47293-7C8C-48C5-9D70-F5E3205A6575","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"6fce3e577e240c057c0a744dc8e4c12e066942fc","datavalue":{"value":"76V05","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1972952$3A69F302-83F6-473B-8F35-65008153302A","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"6bfbe56fcdd941291f10dfd976579e1b68dba99d","datavalue":{"value":"76M30","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1972952$2B8C2C75-11D8-479D-BF69-A4B96E36A5CB","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"31964975a867ece3af58a997107cfebdb3e3ac55","datavalue":{"value":"80A20","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1972952$95A0BCE6-9F5B-40BD-9C35-C3CC9D23496A","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"33f94507fef503f08ebc57651613eedce1e8f07a","datavalue":{"value":"1436717","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1972952$09BEBD3F-3FE4-4A23-9545-6C280D6E4C05","rank":"normal"}],"P1450":[{"mainsnak":{"snaktype":"value","property":"P1450","hash":"9004e9acb1de310d22104d3dfbda5c9559f55024","datavalue":{"value":"uniform epitaxial growth","type":"string"},"datatype":"string"},"type":"statement","id":"Q1972952$D0ED3100-3CCB-43D1-AE10-8BA2C4A1A693","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"689ba655198654bd25c869a7b3e8ddb8c9918cf1","datavalue":{"value":"vertical metalorganic chemical vapor deposition reactor","type":"string"},"datatype":"string"},"type":"statement","id":"Q1972952$DD197F41-EFE6-445A-864B-B7F6A63468A9","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"30e9cf4a875d94cae38472d3b9d8a9890fe2b140","datavalue":{"value":"optimization procedure","type":"string"},"datatype":"string"},"type":"statement","id":"Q1972952$D9904DC2-259D-4C77-B405-072F3E6AE2F3","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"d181290aa3e95c0a2d8d4efc29e1135807015b78","datavalue":{"value":"inlet velocity profile","type":"string"},"datatype":"string"},"type":"statement","id":"Q1972952$2C681818-6266-4186-8B6D-D736E340850D","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"f721cb69e31ae0db21e20f7c6f4f10314d868dff","datavalue":{"value":"6th-degree Chebyshev polynomial","type":"string"},"datatype":"string"},"type":"statement","id":"Q1972952$6B7EF7E6-5268-45ED-A7B0-75EB16F9815A","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1972952$CF31ECDC-DFC2-4BEA-BC9E-2012BEABCBE6","rank":"normal"}],"P205":[{"mainsnak":{"snaktype":"value","property":"P205","hash":"1f65f327dd1e1407a953717cecb1ecacddcb32aa","datavalue":{"value":"https://doi.org/10.1016/s0017-9310(99)00085-x","type":"string"},"datatype":"url"},"type":"statement","id":"Q1972952$6798E2E3-3F05-434F-931E-08CCF3F61666","rank":"normal"}],"P388":[{"mainsnak":{"snaktype":"value","property":"P388","hash":"fd94337b6391b53be0e750dfac60fbc1c87f0c54","datavalue":{"value":"W2062191400","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1972952$7DD95BC9-C89C-4C61-A05C-7C35F2331A3A","rank":"normal"}],"P1643":[{"mainsnak":{"snaktype":"value","property":"P1643","hash":"6121c5c67e622e4f1dfe62f17b437cdda4443a19","datavalue":{"value":{"entity-type":"item","numeric-id":1579279,"id":"Q1579279"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"3a44510c0c8644e40167999b6d4fcdba9a002eae","datavalue":{"value":{"amount":"+0.8532146215438843","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1972952$707CC5E9-C900-4331-B950-BF6831580A4C","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"35c2e1a9b63f7022bde4ea3c8ec4d0abb8d2bf67","datavalue":{"value":{"entity-type":"item","numeric-id":4882080,"id":"Q4882080"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"2e84dc8da08d180bdf3c1a48cbdc47012f5138a4","datavalue":{"value":{"amount":"+0.6951034069061279","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1972952$49FCF0C4-17FB-4FCB-AAF5-1A75E55EF0CD","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"884873b0d781cb7a89d0731b110f48f8cf5a604a","datavalue":{"value":{"entity-type":"item","numeric-id":4037663,"id":"Q4037663"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"e14b725bec359b124d5bfe5c76c05a6e763201ca","datavalue":{"value":{"amount":"+0.6685754060745239","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1972952$3926D515-2A80-44D3-BEA0-716C4E0CA9A1","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"55870e928af16938d4b6ab211865bb58703b036a","datavalue":{"value":{"entity-type":"item","numeric-id":3499085,"id":"Q3499085"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"80b4ccd0f8c4ca479c68f72e41d476a7c22d8beb","datavalue":{"value":{"amount":"+0.6500332951545715","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1972952$9E3D7E14-CCBF-402B-AB4C-CDE6E9ECF941","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"239d9fe6a3819f95afb95767d46f671293f16917","datavalue":{"value":{"entity-type":"item","numeric-id":1265025,"id":"Q1265025"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"c3deffe0ff2254952aa245d0ad5c7bc49215b392","datavalue":{"value":{"amount":"+0.6499614715576172","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1972952$BCEB7529-2842-4B22-9CD2-E30B651410F7","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Publication:1972952","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Publication:1972952"}}}}}