{"entities":{"Q1992306":{"pageid":2003048,"ns":120,"title":"Item:Q1992306","lastrevid":57248520,"modified":"2026-03-27T15:43:24Z","type":"item","id":"Q1992306","labels":{"en":{"language":"en","value":"Dynamic analysis of multilayers based MEMS resonators"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 6971715"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1992306$F63031EA-EF98-4606-BCD3-EE6F165D7730","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"dc0183f4643e1d4cc0b98b1dcaa27cf0aa0d4219","datavalue":{"value":{"text":"Dynamic analysis of multilayers based MEMS resonators","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q1992306$42390C7A-E75C-4938-96DC-F427C4040F3D","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"83a239d1a1a9e3ee17ab97b0216ff8d345055a3d","datavalue":{"value":"1426.74134","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1992306$B3F220C6-8CDB-4867-9BD9-FF2CE9673C74","rank":"normal"}],"P27":[{"mainsnak":{"snaktype":"value","property":"P27","hash":"670ec43f66317e4d589b3a56643b7a2246618341","datavalue":{"value":"10.1155/2017/1262650","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1992306$CC405A26-7C30-4795-A902-FBDDC03B06E7","rank":"normal"}],"P16":[{"mainsnak":{"snaktype":"value","property":"P16","hash":"073707345dbfaadfb81508561903d4b7791a7ec2","datavalue":{"value":{"entity-type":"item","numeric-id":460039,"id":"Q460039"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1992306$6B05765A-BE92-4873-A50F-B932123FF9F0","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"b2b7514d250ff89fb770483edf427869553c5a5f","datavalue":{"value":{"entity-type":"item","numeric-id":1992305,"id":"Q1992305"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1992306$1BCC672E-9129-44E5-9BBB-3C66E0DB4C6D","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"ff66e6744463c970c5d89921b552bb82dd3fde26","datavalue":{"value":{"entity-type":"item","numeric-id":1222998,"id":"Q1222998"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1992306$CA054F55-55A1-430E-9B68-14A8290DC7D9","rank":"normal"}],"P200":[{"mainsnak":{"snaktype":"value","property":"P200","hash":"3dc97bc0aff607b9c22ce37ffa18b6de85001d90","datavalue":{"value":{"entity-type":"item","numeric-id":86199,"id":"Q86199"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1992306$CE66804D-63B5-4823-BCC3-8C5F943CE0D7","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"aa52e5275a0a48fdb54409ff403b7de34344c3c7","datavalue":{"value":{"time":"+2018-11-05T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q1992306$5AF531E5-8BFD-431C-9AF7-18BB01B7110C","rank":"normal"}],"P1448":[{"mainsnak":{"snaktype":"value","property":"P1448","hash":"2d4d53c051b2957284db80d4a2892d465768c852","datavalue":{"value":"Summary: The dynamic behavior of a microelectromechanical system (MEMS) parallel and electrically coupled double-layers (microbeams) based resonator is investigated. Two numerical methods were used to solve the dynamical problem: the reduced-order modeling (ROM) and the perturbation method. The ROM was derived using the so-called Galerkin expansion with considering the linear undamped mode shapes of straight beam as the basis functions. The perturbation method was generated using the method of multiple scales by direct attack of the equations of motion. Dynamic analyses, assuming the above two numerical methods were performed, and a comparison of the results showed good agreement. Finally, a parametric study was performed using the perturbation on different parameters and the results revealed different interesting features, which hopefully can be useful for some MEMS based applications.","type":"string"},"datatype":"string"},"type":"statement","id":"Q1992306$56A4EAAC-74B4-41E1-8606-009D1835669F","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"dabd1caf0a41fb6b96164127b6097eac8dd3a121","datavalue":{"value":"74F15","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1992306$AA9EE677-E648-4B75-9AC0-9E546C5BD371","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"58952d0dc104329cd7f0487605a71075268121c3","datavalue":{"value":"74H45","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1992306$8AE2AEDA-B6BB-4911-A1BA-17F73092696D","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"911db0d1225de079c68873498aaca22c97948b17","datavalue":{"value":"6971715","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1992306$0BDBB054-BECC-4880-B85E-A40B5B819BB0","rank":"normal"}],"P12":[{"mainsnak":{"snaktype":"value","property":"P12","hash":"668e8c2696b9d50e36da233933d9b8b68bcfcc08","datavalue":{"value":"Q59147216","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1992306$BDB6BDD6-BF7A-4CEA-81D8-E88794ED1BBD","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1992306$B56948BB-A0DB-4155-9822-BABB79FE7FA1","rank":"normal"}],"P205":[{"mainsnak":{"snaktype":"value","property":"P205","hash":"dc85adf1e2e2ab0e57b18f9e3cc038acd3388d41","datavalue":{"value":"https://doi.org/10.1155/2017/1262650","type":"string"},"datatype":"url"},"type":"statement","id":"Q1992306$BA700A3B-9F73-4581-8A29-EE33F0D2744A","rank":"normal"}],"P388":[{"mainsnak":{"snaktype":"value","property":"P388","hash":"d5d126660aa7a41c4f91ebed1651d4da496b571a","datavalue":{"value":"W2571546083","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q1992306$7A247ECB-D211-4D36-9635-CD2A0AE49651","rank":"normal"}],"P223":[{"mainsnak":{"snaktype":"value","property":"P223","hash":"736ae9d4e04b8f284b9a04bf7720b5f0433683ed","datavalue":{"value":{"entity-type":"item","numeric-id":2769339,"id":"Q2769339"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1992306$242E386D-582A-456B-B56D-C1DED38A0E03","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"007d9b95ba0f6f49d3b1475d7bb778a16bec48d4","datavalue":{"value":{"entity-type":"item","numeric-id":1621805,"id":"Q1621805"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1992306$54E4E83A-0089-4890-9E94-DB728091BB62","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"9744d9586aee6ed98819efb73b7603760cba5016","datavalue":{"value":{"entity-type":"item","numeric-id":1402532,"id":"Q1402532"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1992306$A24BD6A7-FFA0-4466-B054-6D63F6749DA5","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"d6f3d61dfcc89d2600dc740b0c7ea4a14aebf38a","datavalue":{"value":{"entity-type":"item","numeric-id":5327585,"id":"Q5327585"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1992306$904E74CC-81BD-4434-AC8F-7193A7C0B66C","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"77686efdccb676e4576b21151c143fd27cc2b65c","datavalue":{"value":{"entity-type":"item","numeric-id":1036482,"id":"Q1036482"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1992306$C1DAF60A-2025-4ED4-8A5F-AD6756875FCA","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"7ade50cb8ae37d6f7177cd83e17e632f0510e613","datavalue":{"value":{"entity-type":"item","numeric-id":2499477,"id":"Q2499477"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1992306$B0029EBD-A199-4EA8-B43E-D876F454797C","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"8a8d4b0105ef2d7d88624b0c560050a120821d63","datavalue":{"value":{"entity-type":"item","numeric-id":474778,"id":"Q474778"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1992306$A6B01808-14BD-4E53-AA98-15303761F0A9","rank":"normal"}],"P1643":[{"mainsnak":{"snaktype":"value","property":"P1643","hash":"52303fba578b06bcf45733cae2571e2fed6c02b5","datavalue":{"value":{"entity-type":"item","numeric-id":1728960,"id":"Q1728960"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"a14c2cdb08f8b559f56c458d2138c91a3460338d","datavalue":{"value":{"amount":"+0.8005903363227844","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1992306$64EB380C-40EB-4AE8-B470-2611F1AF5EFF","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"63e30a2d31df4cf841b98f5a12be894fa1dcb4eb","datavalue":{"value":{"entity-type":"item","numeric-id":4355319,"id":"Q4355319"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"213f3e05cff39f84971116418d6dc20a65f54ad4","datavalue":{"value":{"amount":"+0.7738301157951355","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1992306$E6D63111-C574-4B1C-A959-2394967545EC","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"6ef98d83e4839096e708e93ec1a57531b077001f","datavalue":{"value":{"entity-type":"item","numeric-id":551140,"id":"Q551140"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"e39973656e6bff40b3853a37af5c563842b0a851","datavalue":{"value":{"amount":"+0.7692013382911682","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1992306$D60B40C9-084B-4CC9-8CE1-95BA5E9D09B6","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"f7fcedfab332ef2d3b410d9b0f6a3164c029bac0","datavalue":{"value":{"entity-type":"item","numeric-id":3391949,"id":"Q3391949"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"062663b89d15260e7265632f0ef3816d578fdb1d","datavalue":{"value":{"amount":"+0.755951464176178","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1992306$D3A2084B-E717-48B7-872B-8A9AA905F26E","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"2ae11fab5b0c466e25a47287d7fb74dee20087de","datavalue":{"value":{"entity-type":"item","numeric-id":5327585,"id":"Q5327585"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"6d662c6345bc46581a280c0a322db9c2e3a9e42a","datavalue":{"value":{"amount":"+0.7355424165725708","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q1992306$E240FA34-FD43-4D7F-B828-9F3838707B20","rank":"normal"}],"P163":[{"mainsnak":{"snaktype":"value","property":"P163","hash":"45fcd4163b5f33e6e8c784f5522d7246c0a1a61e","datavalue":{"value":{"entity-type":"item","numeric-id":57056,"id":"Q57056"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q1992306$748CC1D3-612D-49D5-AB09-D1BF5AE2BE26","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Publication:1992306","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Publication:1992306"}}}}}