{"entities":{"Q2330367":{"pageid":2341110,"ns":120,"title":"Item:Q2330367","lastrevid":53572115,"modified":"2026-01-25T08:33:40Z","type":"item","id":"Q2330367","labels":{"en":{"language":"en","value":"Simulation and experiment based on FSMLC method with EUPI hysteresis compensation for a piezo-driven micro position stage"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 7120095"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2330367$5EC24825-DDBF-42D3-A8B2-E7595761BA30","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"017dce92b4b5e4a998c25143048b68ee08bfc3aa","datavalue":{"value":{"text":"Simulation and experiment based on FSMLC method with EUPI hysteresis compensation for a piezo-driven micro position stage","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q2330367$73895BDC-8310-461D-9A10-EA665D866DDB","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"8bb244b25641e563fbd86bea3eb1b2deaccdb461","datavalue":{"value":"1423.93074","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q2330367$5AE02052-8CD3-4BC4-9470-959E5EC50844","rank":"normal"}],"P16":[{"mainsnak":{"snaktype":"value","property":"P16","hash":"b7058e1ba5e68554a0d3c0130e61163ead0ad7b1","datavalue":{"value":{"entity-type":"item","numeric-id":2330364,"id":"Q2330364"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2330367$BE21A66F-50FD-44CD-B12C-087BF8ECDB6C","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"d6336d307d8fe01f2e2a20815a3b0f88faeb8102","datavalue":{"value":{"entity-type":"item","numeric-id":259521,"id":"Q259521"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2330367$F1914C22-BF57-48F0-9DC9-DDAB62040046","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"e3cd6ec4c85b1842eb34135f9bdd0d8f6374b172","datavalue":{"value":{"entity-type":"item","numeric-id":2330365,"id":"Q2330365"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2330367$5544D785-FD1C-43D5-A37A-E255A3BC2F20","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"87196d9a20ec31c5a89eeed5f8dc3f88dc370c9c","datavalue":{"value":{"entity-type":"item","numeric-id":2330366,"id":"Q2330366"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2330367$A539412A-62C7-4BFB-95D3-05C2A9893AD1","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"ecadb1b7f5c1666fea32b8ccb4d9df8f17ff1f89","datavalue":{"value":{"entity-type":"item","numeric-id":288913,"id":"Q288913"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2330367$1EFEE67F-6595-43DC-88BF-6A969BF960A7","rank":"normal"}],"P200":[{"mainsnak":{"snaktype":"value","property":"P200","hash":"b71eb180126bfc863b84d620c8d007ebc4f3c390","datavalue":{"value":{"entity-type":"item","numeric-id":199332,"id":"Q199332"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2330367$A6CDF8DC-B151-4D07-A0C0-86B8FCA52253","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"57e80c845c96b0988db493e5ae271fe0a944be8f","datavalue":{"value":{"time":"+2019-10-22T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q2330367$9EFD32A6-6B42-4BF1-A968-E8DD01A26065","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"c9f9620f736fe7e9d98419851a30eb0cb81dd3f3","datavalue":{"value":"93B12","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q2330367$0267DC8A-E973-42FF-9AD4-B8370B389D62","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"6645294f329205d6c74039207697939030eead29","datavalue":{"value":"93C42","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q2330367$527E4A9A-EADB-4502-A0D3-23B0A6456CA2","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"db5586d8085d7ad42b28a9b7755626de6b6febc2","datavalue":{"value":"7120095","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q2330367$B6FF0E3B-212F-4E07-9B32-1F53813B07A4","rank":"normal"}],"P1450":[{"mainsnak":{"snaktype":"value","property":"P1450","hash":"cb62cbbdf0288b8c89ae6dac9834a883bb1bccf2","datavalue":{"value":"EUPI","type":"string"},"datatype":"string"},"type":"statement","id":"Q2330367$E3DCDB9E-F212-4566-AB37-C8BDA4FBE142","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"2dedfd1100f08c705982104e3acb35cb7a526473","datavalue":{"value":"fuzzy","type":"string"},"datatype":"string"},"type":"statement","id":"Q2330367$29A4E630-3F8E-4163-95B2-339F935C793A","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"c9877bc8b465b9c6986f7b77cac50bafb7001945","datavalue":{"value":"hysteresis compensation","type":"string"},"datatype":"string"},"type":"statement","id":"Q2330367$0DEEEB44-FF33-4E29-A138-B1B7F2B18E64","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"754aea696790e5f5e28d663850501c04986d1e36","datavalue":{"value":"micro position stage","type":"string"},"datatype":"string"},"type":"statement","id":"Q2330367$D0F95385-2256-4E45-9D91-47B3B5229FA3","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"86c352551f5f7e953c90ce41761250c6040cd55d","datavalue":{"value":"sliding-mode-like-control","type":"string"},"datatype":"string"},"type":"statement","id":"Q2330367$9F810A2F-229E-4E30-85C3-8BFC4CE68530","rank":"normal"}],"P1463":[{"mainsnak":{"snaktype":"value","property":"P1463","hash":"a709ac7c97c67049e241e0b036253f1d955c589a","datavalue":{"value":{"entity-type":"item","numeric-id":13313,"id":"Q13313"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2330367$C29549A7-29D7-45C4-BD53-A62EBB23A176","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2330367$C959ABA6-E532-4EE5-B91F-8FF7BC6AC8E5","rank":"normal"}],"P205":[{"mainsnak":{"snaktype":"value","property":"P205","hash":"da74afd1b3fb56b3b29b55c087ca47e9b3f40805","datavalue":{"value":"https://doi.org/10.1007/s11424-018-7314-6","type":"string"},"datatype":"url"},"type":"statement","id":"Q2330367$0B5806D5-6B5C-4692-8168-9F15893A38D4","rank":"normal"}],"P388":[{"mainsnak":{"snaktype":"value","property":"P388","hash":"2eeab70d14d66e691afd1cd9b9c481b12b349031","datavalue":{"value":"W2943332762","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q2330367$E390AD26-70F5-465E-9B8C-74E449B79448","rank":"normal"}],"P223":[{"mainsnak":{"snaktype":"value","property":"P223","hash":"1ed00cef3aef2df521c3cfcb45219834cc7d7c73","datavalue":{"value":{"entity-type":"item","numeric-id":5756285,"id":"Q5756285"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2330367$5A085B85-33DF-49AB-A05F-1741B8442D70","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"2b9ed6d526f6f192dc640634a2aed2782f69e117","datavalue":{"value":{"entity-type":"item","numeric-id":328072,"id":"Q328072"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2330367$83FE7636-5DA4-44D9-89BD-F01A8F3DA4FB","rank":"normal"}],"P27":[{"mainsnak":{"snaktype":"value","property":"P27","hash":"1f4d4319b3f8efebf0b766475f61f36502d1eb45","datavalue":{"value":"10.1007/S11424-018-7314-6","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q2330367$36486C98-3339-4191-B5E6-99B864801500","rank":"normal"}],"P1643":[{"mainsnak":{"snaktype":"value","property":"P1643","hash":"ed04ebcd4780b7b09ccb01bdeb9c8b3c240c76fe","datavalue":{"value":{"entity-type":"item","numeric-id":5280284,"id":"Q5280284"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"38bd12b91955ad95aaaf9f6ef2349a359c5cc6c3","datavalue":{"value":{"amount":"+0.778992772102356","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q2330367$BDA5D016-9A40-49E0-8B9F-8FE538BB446E","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"fac9e88cc9249613553c6c199d6846f344aa780d","datavalue":{"value":{"entity-type":"item","numeric-id":4687942,"id":"Q4687942"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"2354438f368b8a7c26629f1e4f1fcb3b3343a7c0","datavalue":{"value":{"amount":"+0.7549143433570862","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q2330367$991A6A19-494F-45B6-AE76-8C9AB5CC3B42","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"b5c83d223eaa531e504a6118c3ffbb71abfedf8d","datavalue":{"value":{"entity-type":"item","numeric-id":1717680,"id":"Q1717680"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"c1c1ea913114ed588b0dce59b666cc37919f3c23","datavalue":{"value":{"amount":"+0.7503480911254883","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q2330367$1CD0106A-6B4C-443F-8EF1-72B3D7813CE9","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"0d6e96d3bd391a1e9132f2662b5ee46a4b466add","datavalue":{"value":{"entity-type":"item","numeric-id":5193920,"id":"Q5193920"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"6bbd92c3d7aadff913c36edf41b4f582e46de81e","datavalue":{"value":{"amount":"+0.7478021383285522","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q2330367$999E8AC0-0858-4E32-86D1-886C3361A04A","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"d07cc1376ceb69c4f2fbe5a181c6d8af6135f2bc","datavalue":{"value":{"entity-type":"item","numeric-id":328072,"id":"Q328072"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"e3b309e6b07f4e7f0f2964bd7650d8c1f9deb579","datavalue":{"value":{"amount":"+0.7462651133537292","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q2330367$C4440B1E-8539-40DE-8B08-7618EC391F56","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Publication:2330367","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Publication:2330367"}}}}}