{"entities":{"Q2860462":{"pageid":2871182,"ns":120,"title":"Item:Q2860462","lastrevid":83929091,"modified":"2026-05-07T14:33:52Z","type":"item","id":"Q2860462","labels":{"en":{"language":"en","value":"Synchronizing control of reticle and wafer stages using iterative learning control"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 6230793"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2860462$EA1CE2BE-15CD-4BA6-85C0-5BD840BD1B52","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"2fe11de59aab05effbee11619ab2fa09e4b914b2","datavalue":{"value":"1289.93076","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q2860462$F798E697-D475-49BE-9193-12013E7AA140","rank":"normal"}],"P16":[{"mainsnak":{"snaktype":"value","property":"P16","hash":"81ca92ef2fea4b21994fa7b55441739e796a7fd9","datavalue":{"value":{"entity-type":"item","numeric-id":2301606,"id":"Q2301606"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2860462$FC604599-F94B-47C1-B38E-75D26B8D11EB","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"2dc2acee1f32393c1a3f36b53f3fc52d31e5df84","datavalue":{"value":{"entity-type":"item","numeric-id":2860461,"id":"Q2860461"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2860462$747E36BC-7E66-4B22-9C81-05BCD1F55433","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"864e55d001a373fe5f1df129cffed8c279a0ad5c","datavalue":{"value":{"entity-type":"item","numeric-id":6773248,"id":"Q6773248"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2860462$E3CF8DBA-3EBC-4B4B-9BD1-4CF74A2868B4","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"d1e993a2f6991c9a71f42a31fdec00230c59b48b","datavalue":{"value":{"time":"+2013-11-19T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q2860462$2D81B250-9122-419A-B6A2-55C85215F793","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"dd9a801a526fc4d8fad4b9db030b9cb0c67a3fce","datavalue":{"value":"93C40","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q2860462$5F0428FB-FD43-4644-B589-D2D93E0842B5","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"ea461e951e051d494afd40e1db25d8a2dd996530","datavalue":{"value":"6230793","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q2860462$59F0D8D2-C17A-4EE0-8327-1333D674489C","rank":"normal"}],"P1450":[{"mainsnak":{"snaktype":"value","property":"P1450","hash":"38338f549b616e6c357d54c857bbcc9e5b9e8deb","datavalue":{"value":"synchronization error","type":"string"},"datatype":"string"},"type":"statement","id":"Q2860462$2AC7DA36-2853-4763-9DDC-6BD19BAECEEF","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"0c36fdb660471927ea94d70117f531ac47839ea9","datavalue":{"value":"iterative learning control","type":"string"},"datatype":"string"},"type":"statement","id":"Q2860462$A6421968-A262-417A-BF90-A5BC18002C39","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"73882a018aa035506e98c475ffae64e3196279a7","datavalue":{"value":"master-slave control","type":"string"},"datatype":"string"},"type":"statement","id":"Q2860462$A903BE74-68B1-4C41-B2FB-4B4389EAD6ED","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"a03e42e98925dcbb3690f4bd379f842e052417ec","datavalue":{"value":"reticle stage","type":"string"},"datatype":"string"},"type":"statement","id":"Q2860462$3D122BCD-4FEF-4A94-9559-1983764BA0C0","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"97fc464dc281f122c8606425d5e7c645991da3dd","datavalue":{"value":"wafer stage","type":"string"},"datatype":"string"},"type":"statement","id":"Q2860462$EF95B8C0-237A-4FF5-923B-67D3B049CDC9","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2860462$F5C1434D-854F-44DB-BD9B-A2A55CD3BD71","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"d43b0bba714abe7c669a11eca0db82092e30305f","datavalue":{"value":{"text":"Synchronizing control of reticle and wafer stages using iterative learning control","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q2860462$B68101B5-C2D4-4AA8-B5A3-AFB560B6D36B","rank":"normal"}],"P200":[{"mainsnak":{"snaktype":"value","property":"P200","hash":"9d23227011ef4589a34b872e8bc0f1757a5d2b4a","datavalue":{"value":{"entity-type":"item","numeric-id":6773208,"id":"Q6773208"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q2860462$26EE344C-13FB-4F2E-B550-152E948EDEF8","rank":"normal"}],"P1643":[{"mainsnak":{"snaktype":"value","property":"P1643","hash":"022e2112059e8d190041154b5e4379aff25444ad","datavalue":{"value":{"entity-type":"item","numeric-id":4454565,"id":"Q4454565"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"95ff4f14a03f01839049b30016edec8fa61739aa","datavalue":{"value":{"amount":"+0.7137995362281799","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q2860462$3CEB34F0-4BE2-4670-AB25-C14B088AF96D","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"218f2f29c90d3f7493b8782a8b406830b8734fba","datavalue":{"value":{"entity-type":"item","numeric-id":2053823,"id":"Q2053823"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"4b4f87e26754177967e004574bd53dfa8dd0aff1","datavalue":{"value":{"amount":"+0.696806013584137","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q2860462$551DAB9C-9486-4404-A1ED-7B17FB9F4601","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"b90d0e6d590067067b4680892635d2a58ce28bfc","datavalue":{"value":{"entity-type":"item","numeric-id":4686302,"id":"Q4686302"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"7c71ad6ccc4b58ad51e17dd286d55b656fdbe87e","datavalue":{"value":{"amount":"+0.6748470664024353","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q2860462$F8FFD295-67F4-46B1-B93E-34EF5BE2FAAF","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"ab346a82b2dbc256eaa15acdca6ef0d9ba23e0da","datavalue":{"value":{"entity-type":"item","numeric-id":4642783,"id":"Q4642783"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"1c905fb0b4de656a6b2b17b093011a7da7d728ec","datavalue":{"value":{"amount":"+0.6683626174926758","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q2860462$2EC6553D-3CAE-43F4-9D3E-3BBD9FA801A2","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"22dbdf4b254604c2a5f3a4d85f3f7314742f8c22","datavalue":{"value":{"entity-type":"item","numeric-id":3456224,"id":"Q3456224"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"1c6c285778553c1cae11c570cc6fc77bb0f03916","datavalue":{"value":{"amount":"+0.6644611358642578","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q2860462$DB94CC77-55E2-4FDD-8544-9F04FFC8EFFD","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Synchronizing control of reticle and wafer stages using iterative learning control","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Synchronizing_control_of_reticle_and_wafer_stages_using_iterative_learning_control"}}}}}