{"entities":{"Q3086740":{"pageid":3097455,"ns":120,"title":"Item:Q3086740","lastrevid":86449700,"modified":"2026-06-03T21:15:48Z","type":"item","id":"Q3086740","labels":{"en":{"language":"en","value":"Electrostatic MEMS: modelling, control, and applications"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 5872229"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3086740$812AF6D1-EF4A-441D-943F-835D223E452C","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"052d61036386e92608995b03804a1374e8f1f00a","datavalue":{"value":"1219.93087","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3086740$7841C665-B94A-4625-BC81-3B005D96E954","rank":"normal"}],"P16":[{"mainsnak":{"snaktype":"value","property":"P16","hash":"3e4d86e3112c56ebe14bdfd2c5a058f0ad006466","datavalue":{"value":{"entity-type":"item","numeric-id":786047,"id":"Q786047"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3086740$9C19C148-2386-40FB-B50F-F9F281700748","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"7689f7450ca45c5720e9af63718c2696a88f018d","datavalue":{"value":{"time":"+2011-03-30T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q3086740$9800FAC5-07AC-48D6-8014-A8451E094425","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"c9727d9ee90ef6c0f1bdf0ba5bb711e9a6b7cd05","datavalue":{"value":"93C95","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3086740$F3263838-DC32-4516-9982-C07154A67E45","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"931f9bc6fe69aba6508703df7e266476edb87eb8","datavalue":{"value":"93B51","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3086740$CE069412-33F6-44F6-AAF7-318410E253CD","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"4feb9bf78742ca71f4b3e4dc76d7ce88806e07ef","datavalue":{"value":"5872229","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3086740$6053BA8A-F184-460B-81FC-2E070AAC1C36","rank":"normal"}],"P1450":[{"mainsnak":{"snaktype":"value","property":"P1450","hash":"2d3be338798d0750cd84bad6bb3695e9adfc783d","datavalue":{"value":"electrostatic microelectromechanical systems (MEMS)","type":"string"},"datatype":"string"},"type":"statement","id":"Q3086740$51BA3A21-7D70-4CA7-9EFC-FE3248133E1F","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"95a2a56f993b51f3fe6313ad9975c60ba69f4561","datavalue":{"value":"high control bandwidth","type":"string"},"datatype":"string"},"type":"statement","id":"Q3086740$4DD74530-9B12-4569-A73A-920048C838E0","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"1d37868f40d28117cd80e12451cf6959778bdd9f","datavalue":{"value":"control system architecture","type":"string"},"datatype":"string"},"type":"statement","id":"Q3086740$1C95326E-656D-43AE-9732-AD35F937AA29","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3086740$6E9E838F-9952-4884-A087-8B560B9630DD","rank":"normal"}],"P1643":[{"mainsnak":{"snaktype":"value","property":"P1643","hash":"b735da003626f24da9e030d1ca1a4436648439c1","datavalue":{"value":{"entity-type":"item","numeric-id":2792212,"id":"Q2792212"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"5c238f41ed570a4fb8bcd67c036922f0d3659a61","datavalue":{"value":{"amount":"+0.7911260724067688","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3086740$961FDA2C-2862-4991-A4A4-9441F5C6506E","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"02cd009e752ae136f47e13f710464b9162e09c5a","datavalue":{"value":{"entity-type":"item","numeric-id":5704774,"id":"Q5704774"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"3cd9019a7cd02297392bc12c96aa4470f73125b2","datavalue":{"value":{"amount":"+0.7807741761207581","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3086740$5C4F5E21-1484-4CDC-A917-95130E784E19","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"7328a686b6e7ec6ffaba6ca6fc33b0f874ea0a4d","datavalue":{"value":{"entity-type":"item","numeric-id":651720,"id":"Q651720"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"5958466d5ed773d0084e25042678becdc305248d","datavalue":{"value":{"amount":"+0.7597086429595947","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3086740$8ABBF22A-6328-429E-A62D-47ADD9F3D8ED","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"b9d7626a89ba2091d5eecdea211d8ca3c30afe05","datavalue":{"value":{"entity-type":"item","numeric-id":2783738,"id":"Q2783738"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"66497c2dcd999e464bcc8ff0d31872c14077dce4","datavalue":{"value":{"amount":"+0.7476530075073242","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3086740$7E1D91A5-4107-4742-BFDC-F3D8F4DAA7A6","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"42c14371aed6300aa6baf2b58715f6a3baa56468","datavalue":{"value":{"entity-type":"item","numeric-id":4592824,"id":"Q4592824"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"44ffe750cdb4d2220b7ef366bcd2d1fd14b91924","datavalue":{"value":{"amount":"+0.7307406663894653","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3086740$79DB66E5-D0D2-415D-AD15-FE3263FFED9F","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Electrostatic MEMS: modelling, control, and applications","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Electrostatic_MEMS:_modelling,_control,_and_applications"}}}}}