{"entities":{"Q3183733":{"pageid":3194441,"ns":120,"title":"Item:Q3183733","lastrevid":86617865,"modified":"2026-06-04T03:01:05Z","type":"item","id":"Q3183733","labels":{"en":{"language":"en","value":"Implementing virtual metrology for in-line quality control in semiconductor manufacturing"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 5618790"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3183733$7133EDB1-DF04-4CB0-8184-B228DB6A21E4","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"e0a35e50e9440fb84b1bf4b24a976eab64b1cefc","datavalue":{"value":{"text":"Implementing virtual metrology for in-line quality control in semiconductor manufacturing","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q3183733$233BF9E3-E3D7-4D54-BDD2-EA27E0EB50C7","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"97e8620e598710876cba42ff6c8ad398efe29df0","datavalue":{"value":"1171.90383","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3183733$0E13439D-DA5C-49F5-AC63-125B700F3E25","rank":"normal"}],"P27":[{"mainsnak":{"snaktype":"value","property":"P27","hash":"3f759fc1774831ac9d0c250c22e8d80a135e1fa7","datavalue":{"value":"10.1080/00207720802645204","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3183733$138DB78E-5D0C-481A-A23B-4DD9AB0A3284","rank":"normal"}],"P16":[{"mainsnak":{"snaktype":"value","property":"P16","hash":"c9d31bae8fcef0fa46bdd6cf7d65d89051ed56d6","datavalue":{"value":{"entity-type":"item","numeric-id":207227,"id":"Q207227"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3183733$AEA72D54-BA15-4234-8A81-69F05F81FFD0","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"3986c49f537357e4b07bbd11044b8e2f5b2a4e54","datavalue":{"value":{"entity-type":"item","numeric-id":3183732,"id":"Q3183732"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3183733$5F904EB2-4F78-463F-9B0B-29C377D99346","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"585d1b6b99d27f199c0f368625ea84cb624d6f9c","datavalue":{"value":{"time":"+2009-10-21T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q3183733$3098903C-8D7A-4DE8-A2DC-8840253E68D1","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"38e213338db24b8f359e8c3fca9e6e9ae655d7ca","datavalue":{"value":"90B30","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3183733$F39A6C5E-DA1E-4AC7-A84C-A7423A295BB5","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"6cb186f7c907ca60893d849df7e69a98dd343f1b","datavalue":{"value":"90B25","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3183733$3A8D8BED-78D7-4CB5-9700-494FD554ADDE","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"c9727d9ee90ef6c0f1bdf0ba5bb711e9a6b7cd05","datavalue":{"value":"93C95","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3183733$3CDD98C9-BE52-4720-BAF9-6682FAC324A8","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"3a45bcd1e4e88a2682d75d5c08a8a261c81badf3","datavalue":{"value":"5618790","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3183733$77E7B567-F28B-46E4-B027-CD4036DBEFA5","rank":"normal"}],"P1450":[{"mainsnak":{"snaktype":"value","property":"P1450","hash":"a90ad728c60ff795687b0514a8b4f01915c60f5f","datavalue":{"value":"quality control","type":"string"},"datatype":"string"},"type":"statement","id":"Q3183733$4303FA42-BEF2-460C-8258-C34D67C1165C","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"4d3fea7f6f2bc66cdad54015041bbefa26c6b9e8","datavalue":{"value":"semiconductor manufacturing","type":"string"},"datatype":"string"},"type":"statement","id":"Q3183733$A3B27501-E28F-4880-822A-125D73FE2DA6","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"b47612ff8c79d7bb21bf829e24b94219aaf4790e","datavalue":{"value":"virtual metrology","type":"string"},"datatype":"string"},"type":"statement","id":"Q3183733$7A797341-F267-4ACA-8502-5E5B2E141C7E","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"1ef17367f0ce44e2ace942b74deae67181e121d9","datavalue":{"value":"SPC","type":"string"},"datatype":"string"},"type":"statement","id":"Q3183733$B5BE0DD1-1027-4D2A-AF0B-A10A88688617","rank":"normal"}],"P1463":[{"mainsnak":{"snaktype":"value","property":"P1463","hash":"063d93e563f9447d1180879855b7b88c35c05897","datavalue":{"value":{"entity-type":"item","numeric-id":18612,"id":"Q18612"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3183733$D126DE0E-BF8B-4DAD-887A-DA8272940420","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1463","hash":"126be67d4c3670981191237a0130bbf087367372","datavalue":{"value":{"entity-type":"item","numeric-id":21507,"id":"Q21507"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3183733$DD8BC82F-CEAF-4D9C-A9F9-4894D607391A","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3183733$98919A02-B12C-47B4-96AC-8F96AC72472D","rank":"normal"}],"P205":[{"mainsnak":{"snaktype":"value","property":"P205","hash":"649dbcfcd3a15e58ed35fa00bfbce756a7bba22e","datavalue":{"value":"https://doi.org/10.1080/00207720802645204","type":"string"},"datatype":"url"},"type":"statement","id":"Q3183733$7169DD16-E47C-42D1-85DA-E510EF3862F8","rank":"normal"}],"P388":[{"mainsnak":{"snaktype":"value","property":"P388","hash":"8c8a609ae58ff2096b4669a4031f751356c39ddd","datavalue":{"value":"W2054281524","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3183733$F8992B37-A051-4FA2-80DE-2031A4D98E90","rank":"normal"}],"P223":[{"mainsnak":{"snaktype":"value","property":"P223","hash":"6fa7b6bebffec810d8b3e528a8866fbca59d94f4","datavalue":{"value":{"entity-type":"item","numeric-id":5309020,"id":"Q5309020"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3183733$8ED01559-DF2F-4E97-8151-A173A5E6109B","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"e74839a632312bf50a479361db31038df5ef8f54","datavalue":{"value":{"entity-type":"item","numeric-id":4795913,"id":"Q4795913"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3183733$97D5A922-64E8-4F83-993A-5EFEC48367E7","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"756e00b541d75fcbf7abeae30a9107d6aa5e47b5","datavalue":{"value":{"entity-type":"item","numeric-id":5444589,"id":"Q5444589"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3183733$DA820842-D7A7-4CF7-B139-A4C4FDB2EDCB","rank":"normal"}],"P200":[{"mainsnak":{"snaktype":"value","property":"P200","hash":"7d28953bd0f0c2d8508713f8e55254124cfc990d","datavalue":{"value":{"entity-type":"item","numeric-id":6544798,"id":"Q6544798"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3183733$906B119C-1051-4021-BF32-1BBFD52CBB13","rank":"normal"}],"P1643":[{"mainsnak":{"snaktype":"value","property":"P1643","hash":"65f20089ad087ec84a2136e0b523fb507a3b86da","datavalue":{"value":{"entity-type":"item","numeric-id":337315,"id":"Q337315"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"2f59ea296183872541ef7829f878b4fd6e2340db","datavalue":{"value":{"amount":"+0.8305120468139648","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3183733$AEF26772-A917-4BF5-B2E9-B0066898C1A2","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"8e0880aa8c6e6bbb1921d03ecffc7d0be03d2edc","datavalue":{"value":{"entity-type":"item","numeric-id":5925913,"id":"Q5925913"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"a8dc03ba122eecd4eeb97d0ce8463e0a226676ec","datavalue":{"value":{"amount":"+0.7205281853675842","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3183733$DB7C7AD0-2A59-4FE4-B2BF-8F2C1ED8AA7C","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"bd626d87df69d9ffb8532a89316d01f9239b576b","datavalue":{"value":{"entity-type":"item","numeric-id":5444429,"id":"Q5444429"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"99683dc6c573d9e566d06b2cc1dfe0c41a73d713","datavalue":{"value":{"amount":"+0.7196037173271179","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3183733$E63D3043-DE90-4C55-A21D-8C3EEAB7C7E9","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"152ced2d98379bd3805e810eeeb1899c6121d3bc","datavalue":{"value":{"entity-type":"item","numeric-id":3369499,"id":"Q3369499"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"4b622aa4fea4a4839605183bb181759cb7260797","datavalue":{"value":{"amount":"+0.7084969282150269","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3183733$60A3AB41-7F6D-409E-9C6E-AC107C999CE7","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"b32588af6bc47a3a076a88bbc5123b626d5f2c28","datavalue":{"value":{"entity-type":"item","numeric-id":3298702,"id":"Q3298702"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"93eaff908f42b0e189a45971500e259fdad1bf9c","datavalue":{"value":{"amount":"+0.707650363445282","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3183733$094F1CC7-6A41-4DBB-9657-D51FD862242A","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Implementing virtual metrology for in-line quality control in semiconductor manufacturing","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Implementing_virtual_metrology_for_in-line_quality_control_in_semiconductor_manufacturing"}}}}}