{"entities":{"Q3369499":{"pageid":3380203,"ns":120,"title":"Item:Q3369499","lastrevid":87018767,"modified":"2026-06-04T10:28:49Z","type":"item","id":"Q3369499","labels":{"en":{"language":"en","value":"Data transformation in SPC for semiconductor machinery control: A case of monitoring particles"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 5002964"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3369499$27B05789-9A7D-4DCA-AB82-A1F3296DABD1","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"6d8521b1e7874b33600b27b2c34f04594a729064","datavalue":{"value":{"text":"Data transformation in SPC for semiconductor machinery control: A case of monitoring particles","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q3369499$3C3DBC96-D9DC-4ED0-AD56-AE9E002C2B13","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"cf5c47b6cbee5206986541147870b0f121370b6f","datavalue":{"value":"1082.90516","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3369499$41679E2E-A299-45E9-881C-6FA0ECD5C222","rank":"normal"}],"P27":[{"mainsnak":{"snaktype":"value","property":"P27","hash":"6caf87d354abe7b72483bf2699d7628297beefd4","datavalue":{"value":"10.1080/00207540500070475","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3369499$3761BC18-B837-4A67-AB8D-57BA8775E0A4","rank":"normal"}],"P200":[{"mainsnak":{"snaktype":"value","property":"P200","hash":"673da1f53d0d4eb4db6096d165970be2c2fb33e2","datavalue":{"value":{"entity-type":"item","numeric-id":80750,"id":"Q80750"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3369499$5935303D-BFFD-41CC-9AAD-EACFE7FCF18D","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"c7fb4130bb17ad439fa844d1246fb434f9a0f593","datavalue":{"value":{"time":"+2006-02-02T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q3369499$6CF85748-ADD2-4AFE-A931-0D02EDA360B9","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"38e213338db24b8f359e8c3fca9e6e9ae655d7ca","datavalue":{"value":"90B30","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3369499$391252B8-D359-41DE-8EBD-AD33DE729A35","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"033472baf65838ddc2c27dd1b84558c91242aa9a","datavalue":{"value":"5002964","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3369499$8D11B7DA-5FA4-44B9-B4E0-BF6497BC31E8","rank":"normal"}],"P1450":[{"mainsnak":{"snaktype":"value","property":"P1450","hash":"4a4b03814179d53440eae5777992afb7500fe013","datavalue":{"value":"machinery control","type":"string"},"datatype":"string"},"type":"statement","id":"Q3369499$A1EE2F29-FCAB-44B3-BC32-7C3B3CAA53BD","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"4d3fea7f6f2bc66cdad54015041bbefa26c6b9e8","datavalue":{"value":"semiconductor manufacturing","type":"string"},"datatype":"string"},"type":"statement","id":"Q3369499$7B8AEE16-B1BD-472E-B05B-F0DFF2E1EE8F","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"c261a19594cb66ba1f44df39114b5278fb378cd7","datavalue":{"value":"control chart","type":"string"},"datatype":"string"},"type":"statement","id":"Q3369499$634E3603-AAFB-469D-884B-BE6D79C9BEFB","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"04735cabd0763003887ef1a09a79f496d571e9ce","datavalue":{"value":"particle counts","type":"string"},"datatype":"string"},"type":"statement","id":"Q3369499$4E8E1C3A-C567-4617-B206-DB6CC333384E","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3369499$CEDAB493-07E6-4481-B92D-44BAA4990E7C","rank":"normal"}],"P205":[{"mainsnak":{"snaktype":"value","property":"P205","hash":"5d732ff04a63fb1e4afc07b9cf567c627799156c","datavalue":{"value":"https://doi.org/10.1080/00207540500070475","type":"string"},"datatype":"url"},"type":"statement","id":"Q3369499$651B14C8-9171-4CE8-A9FC-0A905FA18E80","rank":"normal"}],"P388":[{"mainsnak":{"snaktype":"value","property":"P388","hash":"af7faf4352e4240694fd3eb33cb41f1294cb3d20","datavalue":{"value":"W2079030878","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3369499$7AF7154B-0765-436D-9CC5-E170413F25C0","rank":"normal"}],"P223":[{"mainsnak":{"snaktype":"value","property":"P223","hash":"8b81602f292317507a2cbba3ca101907a4540ccc","datavalue":{"value":{"entity-type":"item","numeric-id":4530619,"id":"Q4530619"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3369499$252CE593-5A8B-4F32-905F-11732A005394","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"0e3c85c984f9b05058cea91b477596ae3e501a83","datavalue":{"value":{"entity-type":"item","numeric-id":3806542,"id":"Q3806542"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3369499$19374F9E-FBBC-4659-8B4D-560A2756C96F","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"2f96b0028bf2878be0f0fc94effdf9f43cb57c6c","datavalue":{"value":{"entity-type":"item","numeric-id":4245736,"id":"Q4245736"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3369499$0387FE55-0BE8-43B7-A334-22A7EDB11F77","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"24f09d39ef832c3fbe53be1ad7e52fe3d211beb9","datavalue":{"value":{"entity-type":"item","numeric-id":5958225,"id":"Q5958225"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3369499$1F61510A-F7BE-4BBB-B68A-89C9B6BCF8F4","rank":"normal"}],"P1643":[{"mainsnak":{"snaktype":"value","property":"P1643","hash":"bfce90ed0a2d280dcc906212a7ae238459b35ad2","datavalue":{"value":{"entity-type":"item","numeric-id":2915298,"id":"Q2915298"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"3f1fba105824178d67ec019f1df57b56cb0fb318","datavalue":{"value":{"amount":"+0.7542141675949097","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3369499$88BD3D9B-ADD8-40AC-AF2C-DE9D7CF4DC65","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"bd626d87df69d9ffb8532a89316d01f9239b576b","datavalue":{"value":{"entity-type":"item","numeric-id":5444429,"id":"Q5444429"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"15e7f66bf4f350280e36a8f748701e4d15667134","datavalue":{"value":{"amount":"+0.7134288549423218","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3369499$EE6948FC-C012-467F-8DBB-D26B7BA2BCA0","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"f467e177b1b7874d159baf3dffbd42a296707928","datavalue":{"value":{"entity-type":"item","numeric-id":3163173,"id":"Q3163173"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"545fb3e9bc4095530d2978648de3fb5821db7f0d","datavalue":{"value":{"amount":"+0.7105533480644226","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3369499$E8FF5326-6D92-46CC-A38E-6FD023C31AFB","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"524f112cac3b768942768d01643c9c5c6cc35a54","datavalue":{"value":{"entity-type":"item","numeric-id":3183733,"id":"Q3183733"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"4b622aa4fea4a4839605183bb181759cb7260797","datavalue":{"value":{"amount":"+0.7084969282150269","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3369499$BAA533E8-5815-4798-A70D-FE6A8F8292CF","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"b32588af6bc47a3a076a88bbc5123b626d5f2c28","datavalue":{"value":{"entity-type":"item","numeric-id":3298702,"id":"Q3298702"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"0ce9117daecb762de5a1b3dc18081bea0e17f430","datavalue":{"value":{"amount":"+0.6990546584129333","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3369499$4C3AAA00-D926-4CF0-88E6-4E5BFEB89D0E","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Data transformation in SPC for semiconductor machinery control: A case of monitoring particles","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Data_transformation_in_SPC_for_semiconductor_machinery_control:_A_case_of_monitoring_particles"}}}}}