{"entities":{"Q337289":{"pageid":339056,"ns":120,"title":"Item:Q337289","lastrevid":52672169,"modified":"2026-01-23T05:53:48Z","type":"item","id":"Q337289","labels":{"en":{"language":"en","value":"Applications of quantitative methods in semiconductor manufacturing"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 6650778"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q337289$11160A13-8458-4A54-99EE-DBD52502DBED","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"e20771cb178fb16a454fffd4f37e68a9b63131af","datavalue":{"value":{"text":"Applications of quantitative methods in semiconductor manufacturing","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q337289$658FD68F-47FF-445C-BB12-0058609F98C3","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"861b8917766f88f2db2bd8a836c3267881ba700c","datavalue":{"value":"1348.90446","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q337289$D1A0C17C-5DA5-4E35-AEB3-4ECA167270B1","rank":"normal"}],"P200":[{"mainsnak":{"snaktype":"value","property":"P200","hash":"e630590c5ca6e787c3c7b5e291898405495fea2b","datavalue":{"value":{"entity-type":"item","numeric-id":162215,"id":"Q162215"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q337289$122FC22A-18D9-425E-B027-4180F322575E","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"63d0e318193755aad4791a0eda98082328d97c13","datavalue":{"value":{"time":"+2016-11-10T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q337289$4AAC0F3A-FA30-4B6C-88F7-C2873BA08098","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"a9593e5ddcedb2f08bc74f7498f9d2699b59af8d","datavalue":{"value":"90B90","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q337289$5EF5F0A6-E0E6-4A9D-8C86-9985E18922E1","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"ecbbf3779c517fef97ab936b0a129d7ef035b583","datavalue":{"value":"90-06","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q337289$FC5F8942-71FD-403F-A29D-75AA6FA16584","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"42dd8b678a90f6eb0995b748fef5b6ee6b35e705","datavalue":{"value":"6650778","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q337289$4E99F2FE-202C-4347-A721-CD3B1B3D6C6D","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q337289$C32B7C1A-6D45-4DC6-9DE6-A97D4C2AF33E","rank":"normal"}],"P205":[{"mainsnak":{"snaktype":"value","property":"P205","hash":"db66ab1dfdb0846d7a2fce7f10cc5cc52a187e2f","datavalue":{"value":"https://doi.org/10.1016/j.cor.2014.08.003","type":"string"},"datatype":"url"},"type":"statement","id":"Q337289$A098F530-8662-479C-86F0-C67BD1164AEA","rank":"normal"}],"P388":[{"mainsnak":{"snaktype":"value","property":"P388","hash":"79995e251c1c7b9c6d283bc70ebe7776099c5907","datavalue":{"value":"W2038842732","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q337289$C9F0C582-2645-44F6-9DD8-12921C0B1648","rank":"normal"}],"P27":[{"mainsnak":{"snaktype":"value","property":"P27","hash":"f1e08b578f95a45eb3f3bba6c9a34112b9d98bfe","datavalue":{"value":"10.1016/J.COR.2014.08.003","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q337289$A88B7F4D-E251-4963-BEA4-682F8081AFBD","rank":"normal"}],"P1643":[{"mainsnak":{"snaktype":"value","property":"P1643","hash":"3379cadda6fb862275d9d894a1e0bd7a4705b527","datavalue":{"value":{"entity-type":"item","numeric-id":4347083,"id":"Q4347083"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"afd3616d9bf051527ba59fb8864ef5471ddaaca6","datavalue":{"value":{"amount":"+0.7226043939590454","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q337289$95F94D03-9C25-4CC0-AF81-AAEF968BA37B","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"9923f27b6ecfa596455760313912d570e12d64c2","datavalue":{"value":{"entity-type":"item","numeric-id":4305751,"id":"Q4305751"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"afd3616d9bf051527ba59fb8864ef5471ddaaca6","datavalue":{"value":{"amount":"+0.7226043939590454","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q337289$4696E2A1-97F9-470D-A8D9-DC2D31AC8245","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"a1237adddc48bb4a5f562f95cc36a58229b81da1","datavalue":{"value":{"entity-type":"item","numeric-id":3059925,"id":"Q3059925"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"caf43ab0e0195ff3536c025319d49f8b6816e5fc","datavalue":{"value":{"amount":"+0.6979831457138062","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q337289$FD42B31F-C1D7-45B8-AFA0-2B28D29C9A52","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"2d35ba08a198db08141cddae8bdef845f22d9214","datavalue":{"value":{"entity-type":"item","numeric-id":5219974,"id":"Q5219974"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"1e6ec05b474435ec7eba6e28a24932bda1623960","datavalue":{"value":{"amount":"+0.6887370347976685","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q337289$F9FC0146-9341-4414-BB0F-0FD967FDB2BD","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"ab71a625a538b194642223b8ff132d6d5f6e02a7","datavalue":{"value":{"entity-type":"item","numeric-id":5411849,"id":"Q5411849"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"557ea7752e566f288e510418da7a7ece7e10e84a","datavalue":{"value":{"amount":"+0.6856300234794617","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q337289$5F31769F-54B0-4C26-8015-4009C9012CE6","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Publication:337289","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Publication:337289"}}}}}