{"entities":{"Q3503249":{"pageid":5533152,"ns":120,"title":"Item:Q3503249","lastrevid":48772714,"modified":"2026-01-05T20:07:33Z","type":"item","id":"Q3503249","labels":{"en":{"language":"en","value":"Mechanics of direct wafer bonding"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 5277997"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3503249$4999CEA4-D064-4FC2-9340-E52E853A440F","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"a1cfe7de3c0ad4c65d4892b61daea5bb14ebedbb","datavalue":{"value":{"text":"Mechanics of direct wafer bonding","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q3503249$5B9F3B15-782B-4CEE-B8A2-1F7844DF36C4","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"27fbdba6a0a93c18542b621b26555f27673a84b3","datavalue":{"value":"1149.74374","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3503249$DC7EF04F-DE2F-4B2C-AFEE-4899B0E7E5A5","rank":"normal"}],"P16":[{"mainsnak":{"snaktype":"value","property":"P16","hash":"862ea11128c3c11f4789b9b9e55fed7d83226268","datavalue":{"value":{"entity-type":"item","numeric-id":3503247,"id":"Q3503247"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3503249$5F6ECB58-F9CA-4D95-8E9A-AE63272EBD57","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"a377b1303e2fdff30f6237ce00c9c68bbf97ef4f","datavalue":{"value":{"entity-type":"item","numeric-id":3503248,"id":"Q3503248"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3503249$C98DC094-C533-4112-AC5E-194621D396DA","rank":"normal"}],"P200":[{"mainsnak":{"snaktype":"value","property":"P200","hash":"f5a00c64a696bf450ed3d826ff7eb3b8e47123ab","datavalue":{"value":{"entity-type":"item","numeric-id":69632,"id":"Q69632"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3503249$CD76E818-24EA-4178-BAED-89B5CD125017","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"767dc2dde9b80501254370ea98716c04e9449c65","datavalue":{"value":{"time":"+2008-05-22T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q3503249$B1EBF362-6A58-454E-99C6-384712A475E5","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"b3fadd4f1b2f2e02f71da5708edfacd7e2b0600e","datavalue":{"value":"74M15","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3503249$192E41E5-C26A-4B74-985F-4679F36F8034","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"869f62c27388203798a62f9b8cafde55b9cc1a8e","datavalue":{"value":"74R10","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3503249$1EE34DF6-0BEE-4301-8B5C-EE64C60597F0","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"1feaf8f6fbbcac1b767df0c5abc58e1b0637f5ab","datavalue":{"value":"5277997","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3503249$2EE90A81-5C98-4B77-B826-798A2B3F0468","rank":"normal"}],"P1450":[{"mainsnak":{"snaktype":"value","property":"P1450","hash":"394e954e8c9840f44909a3bc67c624cf3e6dee7b","datavalue":{"value":"wafer bonding","type":"string"},"datatype":"string"},"type":"statement","id":"Q3503249$A65A48AF-A9B3-4E00-BF07-E144FBE0EAD2","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"9d674c9802a9d471f63a18a1b93e9561dad7f570","datavalue":{"value":"adhesion","type":"string"},"datatype":"string"},"type":"statement","id":"Q3503249$D146D64F-A72D-4DA2-AC41-090748E21EBF","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"523fe38d73001f97f7166d054833d1eaf71112ca","datavalue":{"value":"surface forces","type":"string"},"datatype":"string"},"type":"statement","id":"Q3503249$FDF61628-2532-4DBA-92F8-593CE15BBAB0","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"7ceb58749a20fe8ce282262f5d3aaa8a688ed9f9","datavalue":{"value":"JKR","type":"string"},"datatype":"string"},"type":"statement","id":"Q3503249$C375A434-F7EA-42E7-B62F-90E119310CFE","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3503249$C7191601-66D3-4F1D-AC3A-8A0985EB0A9A","rank":"normal"}],"P205":[{"mainsnak":{"snaktype":"value","property":"P205","hash":"334152b29a263a3bb56839fa8cbd9b1b2baa5afc","datavalue":{"value":"https://doi.org/10.1098/rspa.2005.1571","type":"string"},"datatype":"url"},"type":"statement","id":"Q3503249$AF1C04DB-BBBD-47A5-8DDE-317FFED19CDD","rank":"normal"}],"P388":[{"mainsnak":{"snaktype":"value","property":"P388","hash":"2e4000ee3a2bbd7e81fc0358ac644ddcec497ca9","datavalue":{"value":"W2127617591","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3503249$2E03C956-E461-437A-A7D1-CDD9E5636B80","rank":"normal"}],"P223":[{"mainsnak":{"snaktype":"value","property":"P223","hash":"e24d66f015fda7cc0634634adc9eef250d452c94","datavalue":{"value":{"entity-type":"item","numeric-id":4214507,"id":"Q4214507"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q3503249$C8E2396D-0ADE-4126-AF0D-057081DEC4EC","rank":"normal"}],"P27":[{"mainsnak":{"snaktype":"value","property":"P27","hash":"3041b0f29bc0a466b920e40eb662cce264f4b6c0","datavalue":{"value":"10.1098/RSPA.2005.1571","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q3503249$33E833FF-1B6D-42AB-9EC3-6B2C50C113FF","rank":"normal"}],"P1643":[{"mainsnak":{"snaktype":"value","property":"P1643","hash":"207dd7b0b0813ff79efe9961fb82c55ba5a6c4af","datavalue":{"value":{"entity-type":"item","numeric-id":1973600,"id":"Q1973600"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"a2f1e86208e620f035bb7fbc972f341f84cf0c38","datavalue":{"value":{"amount":"+0.8523874","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ac3c626774dcd0d16f89557f66586245841a01db","datavalue":{"value":{"entity-type":"item","numeric-id":6767936,"id":"Q6767936"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3503249$50ADCEA4-C454-4FA4-BB75-B64C7DB09E82","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"d83494764ee1cdaf0c3d605b4e7222c65429e54f","datavalue":{"value":{"entity-type":"item","numeric-id":4804341,"id":"Q4804341"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"2659ed6ad68b56618c20f51e1b88152857556bc6","datavalue":{"value":{"amount":"+0.811605","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ac3c626774dcd0d16f89557f66586245841a01db","datavalue":{"value":{"entity-type":"item","numeric-id":6767936,"id":"Q6767936"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3503249$BAD44AA9-B0A1-4BEF-9218-828125607221","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"95c331ce1ebe025ef4f328ddbaea6ce60a7186a1","datavalue":{"value":{"entity-type":"item","numeric-id":3348526,"id":"Q3348526"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"9ff50d09444d6e9519e0044a1634813726e1b116","datavalue":{"value":{"amount":"+0.7952693","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ac3c626774dcd0d16f89557f66586245841a01db","datavalue":{"value":{"entity-type":"item","numeric-id":6767936,"id":"Q6767936"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3503249$9F6287CA-2D5C-4086-8438-3F04ECBB9BC9","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"5e90a66345e9c13558982fbd654409ea3951e567","datavalue":{"value":{"entity-type":"item","numeric-id":6160045,"id":"Q6160045"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"cc27b7c18719836a7130d04be8d756c029517c09","datavalue":{"value":{"amount":"+0.7889458","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ac3c626774dcd0d16f89557f66586245841a01db","datavalue":{"value":{"entity-type":"item","numeric-id":6767936,"id":"Q6767936"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3503249$2D0EC70B-ED2E-43BB-A778-4F97899B44D1","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"af3bc77115cd0be9efa959271eefe2aabea63834","datavalue":{"value":{"entity-type":"item","numeric-id":2914091,"id":"Q2914091"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"ef6dd81725137da2ee66e750e4bd63b348674b9c","datavalue":{"value":{"amount":"+0.78874826","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ac3c626774dcd0d16f89557f66586245841a01db","datavalue":{"value":{"entity-type":"item","numeric-id":6767936,"id":"Q6767936"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3503249$EEFD0712-5946-41C5-8B21-6BDC3EE1C403","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"2a096b59affae2ee7801e8ade3351a523abfbbce","datavalue":{"value":{"entity-type":"item","numeric-id":2500505,"id":"Q2500505"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"3f943565b66cafe00fa548a621df13fd1916692f","datavalue":{"value":{"amount":"+0.7863109","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ac3c626774dcd0d16f89557f66586245841a01db","datavalue":{"value":{"entity-type":"item","numeric-id":6767936,"id":"Q6767936"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3503249$975CE0E9-CBEE-41BF-8BF8-D1752371BFB0","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"baf085b73006e205d4ef103579dcf8c62f902c93","datavalue":{"value":{"entity-type":"item","numeric-id":2401052,"id":"Q2401052"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"e743fa9138a9ef8742cbcbbac910e448a9a8f283","datavalue":{"value":{"amount":"+0.78295594","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ac3c626774dcd0d16f89557f66586245841a01db","datavalue":{"value":{"entity-type":"item","numeric-id":6767936,"id":"Q6767936"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3503249$8AB50A57-F563-4FA6-8168-2067239641D1","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"e091759f43b8952907065ea55a493b486cf6a8ca","datavalue":{"value":{"entity-type":"item","numeric-id":2505825,"id":"Q2505825"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"a123ea72c005a46fbfead695e2651f13d8ce9cc5","datavalue":{"value":{"amount":"+0.7771975","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ac3c626774dcd0d16f89557f66586245841a01db","datavalue":{"value":{"entity-type":"item","numeric-id":6767936,"id":"Q6767936"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3503249$66F31BF8-A00E-41CC-BF9E-B493F59AD54D","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"abe2e971e8d6450df55337ee24f78bbf56375401","datavalue":{"value":{"entity-type":"item","numeric-id":1976981,"id":"Q1976981"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"abe43880420c4891822e37e9a9dd1c88d112050e","datavalue":{"value":{"amount":"+0.77587783","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ac3c626774dcd0d16f89557f66586245841a01db","datavalue":{"value":{"entity-type":"item","numeric-id":6767936,"id":"Q6767936"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3503249$88040104-C74F-4E57-9CC2-110C36EBCBDD","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"944aaabdee981a2ed40d3b0c02371d0ef20d27db","datavalue":{"value":{"entity-type":"item","numeric-id":1860987,"id":"Q1860987"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"9256bd796bf16b65b02e721980c3989e9a5f19be","datavalue":{"value":{"amount":"+0.775856","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ac3c626774dcd0d16f89557f66586245841a01db","datavalue":{"value":{"entity-type":"item","numeric-id":6767936,"id":"Q6767936"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q3503249$E8583F82-8F54-4259-93EA-5C168BBD0857","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Publication:3503249","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Publication:3503249"}}}}}