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The front tracked in etching and deposition processes is the interface between the solid material and the ambient gas or vacuum. A mathematical description of the evolution process is obtained when the evolving interface at time \\(t\\) is represented as the level set of a function \\(\\Phi(X,t)= 0\\). The interface evolution is described in the form of a Hamilton-Jacobi equation \\[ \\Phi_t(X, t)+ H(X,\\Phi,\\nabla\\Phi(X))= 0, \\] \\[ H(X,\\Phi, \\nabla\\Phi(X))= C\\Biggl(X, \\Phi, {\\nabla\\Phi(X)\\over |\\nabla\\Phi(X)|}\\Biggr)|\\nabla\\Phi(X)|. \\] The front tracking method gives physically admissible solutions with sharply defined cusps and corners, even with relatively coarse grids. 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