{"entities":{"Q4594900":{"pageid":6624485,"ns":120,"title":"Item:Q4594900","lastrevid":52966181,"modified":"2026-01-23T22:29:41Z","type":"item","id":"Q4594900","labels":{"en":{"language":"en","value":"Stress-dependent local oxidation of silicon"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 6813055"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q4594900$6B04AF88-914B-4833-8F54-959D3966C60D","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"6ef02b45690b64a6f2c6ee2b5ef0959959240894","datavalue":{"value":{"text":"Stress-Dependent Local Oxidation of Silicon","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q4594900$62430864-6F33-4A64-A7F5-645EB88E0174","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"f2f06fc8a5458ee02b6fac4e445c96790386f738","datavalue":{"value":"1375.76041","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q4594900$6E7FB548-B21D-4B49-88B9-695E8D6762CE","rank":"normal"}],"P27":[{"mainsnak":{"snaktype":"value","property":"P27","hash":"cb1a719e8ad2af0d7d4ac748a90839b6d854f0fa","datavalue":{"value":"10.1137/16M1060613","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q4594900$9FFEF5CF-63D2-4031-A399-ED0A094E2CFA","rank":"normal"}],"P16":[{"mainsnak":{"snaktype":"value","property":"P16","hash":"9935b9d1b1862e3f33445afd264ab6b64fc52434","datavalue":{"value":{"entity-type":"item","numeric-id":227342,"id":"Q227342"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q4594900$441FDD51-7790-413E-A7B1-814713FE69ED","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"76968189cb9f99552054fb04b231b895bf740e56","datavalue":{"value":{"entity-type":"item","numeric-id":591346,"id":"Q591346"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q4594900$CF49DFD5-C905-4D09-8FBF-0A8D4CB6D787","rank":"normal"}],"P200":[{"mainsnak":{"snaktype":"value","property":"P200","hash":"d4885a0e131e83bfd1dec458cec71d002244f2a9","datavalue":{"value":{"entity-type":"item","numeric-id":2706070,"id":"Q2706070"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q4594900$268283A6-16FB-4825-99AA-EBEC829D86E1","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"715399c2897cb52127a77e83441275529c8bf495","datavalue":{"value":{"time":"+2017-11-27T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q4594900$ABFD9700-2358-4921-91AE-A6DA556FEC96","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"446aca5134723d63f06354ad6b322520d5143253","datavalue":{"value":"76D07","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q4594900$EDB22F60-F184-4D1C-BDE7-7E168C567B52","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"4f9ce7207377c3057af05a275234cbcb44769c35","datavalue":{"value":"35C20","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q4594900$E26CB8A1-6F31-460D-806D-31CDB6CEBF1B","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"70e3c0526f567a00de7b7121ff70bed0f54f406d","datavalue":{"value":"6813055","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q4594900$5C73DE9D-C9FD-447A-8410-444C336FD949","rank":"normal"}],"P1450":[{"mainsnak":{"snaktype":"value","property":"P1450","hash":"31aa8ba353123f3e53eded776d69e75355f4124d","datavalue":{"value":"silicon oxidation","type":"string"},"datatype":"string"},"type":"statement","id":"Q4594900$BEB2C54B-615E-4B68-8A29-91D150898299","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"4536a45aece8248bc044b3e86bf13473112d8fa4","datavalue":{"value":"stress-dependent reaction coefficient","type":"string"},"datatype":"string"},"type":"statement","id":"Q4594900$E75AB1A4-1F99-4A43-81AC-161EEAA09289","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"224e161404e1e34c12543fb2bcfd4d3a8a0f3cf2","datavalue":{"value":"matched asymptotic expansions","type":"string"},"datatype":"string"},"type":"statement","id":"Q4594900$A2A6444C-6F5A-4FC1-BA94-F803E63D01F0","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q4594900$FD7C3AEE-932B-4E4E-801E-34D16C8EB31D","rank":"normal"}],"P223":[{"mainsnak":{"snaktype":"value","property":"P223","hash":"e10f0d0497341570ec71930dee80ca509170ab1e","datavalue":{"value":{"entity-type":"item","numeric-id":5797782,"id":"Q5797782"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q4594900$AAC2BBD0-41E3-48BF-8E7E-0FED66FBB742","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"4a6802d720eff3d0d8ef4541c6fcf6608aa6a05b","datavalue":{"value":{"entity-type":"item","numeric-id":1577265,"id":"Q1577265"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q4594900$29D7A424-C02F-40A2-8C38-8D869DF7956D","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"1c73bf715c5ee0a845f9fd67c938813fb1a25132","datavalue":{"value":{"entity-type":"item","numeric-id":3818028,"id":"Q3818028"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q4594900$1D95D068-AD7E-4621-A103-62D2909A5E9B","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"af1b640249a197c0f9a252ae9e2a10d57de995b2","datavalue":{"value":{"entity-type":"item","numeric-id":3826286,"id":"Q3826286"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q4594900$ADAFFFCC-EB4F-4664-8ACD-9117B297B763","rank":"normal"}],"P205":[{"mainsnak":{"snaktype":"value","property":"P205","hash":"60ae6670a1b055055337c660c8073572714c926b","datavalue":{"value":"https://doi.org/10.1137/16m1060613","type":"string"},"datatype":"url"},"type":"statement","id":"Q4594900$CF269894-7FD9-48BC-A76B-4D1D7F4DE869","rank":"normal"}],"P388":[{"mainsnak":{"snaktype":"value","property":"P388","hash":"118f6dc3c28ef37de62ef658b170315f9b967429","datavalue":{"value":"W2768925472","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q4594900$EE9458B7-8C14-4951-B9B5-7F09D4AC0E2A","rank":"normal"}],"P1643":[{"mainsnak":{"snaktype":"value","property":"P1643","hash":"c8c1d7ed4ab52596deacee5e9af8676bbcf462f4","datavalue":{"value":{"entity-type":"item","numeric-id":1577265,"id":"Q1577265"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"2ee7fa8bed41adac5d8eb3e54146b7294f58c7bf","datavalue":{"value":{"amount":"+0.8859972953796387","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q4594900$1D538CDC-82A5-4A2A-97CA-73DB78871921","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"b827aa8c772957f9956f4c8fb00cecfa6d105338","datavalue":{"value":{"entity-type":"item","numeric-id":3826286,"id":"Q3826286"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"2d4a3fc3502b54b7f67ca0c172b9e0954ee0e2aa","datavalue":{"value":{"amount":"+0.8008180856704712","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q4594900$A2C4894A-F432-4123-8DB1-EB3B279C9BC8","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"c067e156fa43a7adc75e6a411fad5a395c71d7a0","datavalue":{"value":{"entity-type":"item","numeric-id":3818028,"id":"Q3818028"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"9557b543006d659718bdcbd6947f7b00ffff10ec","datavalue":{"value":{"amount":"+0.7915825843811035","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q4594900$3C15CA1E-BBF3-4F88-ACB6-9B1F6AEA019C","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"21240e43c7ae3bd25e6690477291e20827123a21","datavalue":{"value":{"entity-type":"item","numeric-id":4344304,"id":"Q4344304"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"15c1dccb5adcf1dab52c965ea92b2f713ce95c77","datavalue":{"value":{"amount":"+0.7855530381202698","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q4594900$907781E3-3027-41D6-B30E-2D20E7E310F5","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"0716067cf48722cae4e7280f7b7bd241fc4d9f3f","datavalue":{"value":{"entity-type":"item","numeric-id":2501282,"id":"Q2501282"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"ce7e0fbba280eb754abd1b2e93995f1164154e8f","datavalue":{"value":{"amount":"+0.7649961709976196","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q4594900$E60B7DE6-65AB-4214-B241-77BF48A08AA8","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Publication:4594900","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Publication:4594900"}}}}}