{"entities":{"Q4700816":{"pageid":6730393,"ns":120,"title":"Item:Q4700816","lastrevid":40779053,"modified":"2025-04-04T16:12:44Z","type":"item","id":"Q4700816","labels":{"en":{"language":"en","value":"A three\u2010dimensional numerical method for thermal analysis in X\u2010ray lithography"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 1358252"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q4700816$B6D6ECE4-8A5F-4D4B-A1F3-AB43DB587F39","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"e1a9827162a4815dda46cac2894d244bcd555417","datavalue":{"value":{"text":"A three\u2010dimensional numerical method for thermal analysis in X\u2010ray lithography","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q4700816$C535C2A0-7D5D-4CF3-B7CB-0A1224BA766F","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"51ba661edbd02aec0fd341d79941514578a60a88","datavalue":{"value":"0935.78017","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q4700816$669D66B0-6294-498D-B8B8-8284A9D50976","rank":"normal"}],"P27":[{"mainsnak":{"snaktype":"value","property":"P27","hash":"ba21b52604dc2adb54f4d2e8a9e96e1e2612ec9b","datavalue":{"value":"10.1108/09615539810213188","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q4700816$ED7E4633-1728-4670-A348-375DB0F32E10","rank":"normal"}],"P16":[{"mainsnak":{"snaktype":"value","property":"P16","hash":"1863a2b632c2113b8686f421eadac3e97d075a36","datavalue":{"value":{"entity-type":"item","numeric-id":208887,"id":"Q208887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q4700816$B729CBA5-D18D-4A2E-B929-597639B0AF51","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"4f7d688f01a4abec6ebf2bb15f289528eee956a7","datavalue":{"value":{"entity-type":"item","numeric-id":1212881,"id":"Q1212881"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q4700816$9D3ABC8E-3AC3-4955-AA3C-3EF2A2A14AB8","rank":"normal"}],"P200":[{"mainsnak":{"snaktype":"value","property":"P200","hash":"754b27638f37eae43b43f68ac189f4204e073493","datavalue":{"value":{"entity-type":"item","numeric-id":2702931,"id":"Q2702931"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q4700816$59683A54-8AC6-4212-B67E-2D40026A470C","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"c7543152ecddaf21ed728b3008f8361c72e57a31","datavalue":{"value":{"time":"+2000-05-09T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q4700816$D63A9DA2-8BDF-4483-AC72-F3BD20716632","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"a79be69f589d0a718dddf093e8ab1697aca1f7e5","datavalue":{"value":"78M20","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q4700816$0E886993-AA8B-40DB-A69A-6C09CAF51B2F","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"f5e636faf68095c82529de63da2e347a926072da","datavalue":{"value":"78A55","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q4700816$69023872-8E3A-4354-B2A0-7E72DA6CF703","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"31964975a867ece3af58a997107cfebdb3e3ac55","datavalue":{"value":"80A20","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q4700816$756E1E6C-33B6-46C3-9A1D-F3EFB58A30E6","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"780a147d33ab9ad15d1351332514595f52eeb6f5","datavalue":{"value":"80M20","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q4700816$6B740EFF-C1A6-4749-B1CE-51CDF2EBC1F4","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"0c5d139290595dfdc4002f99427f34d1369f0af6","datavalue":{"value":"1358252","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q4700816$85E54457-6094-412E-BD3D-668B48B1FA67","rank":"normal"}],"P1450":[{"mainsnak":{"snaktype":"value","property":"P1450","hash":"48aa61d5933eeb16ac5ea82cbc26412f6e2bb4d3","datavalue":{"value":"finite difference method","type":"string"},"datatype":"string"},"type":"statement","id":"Q4700816$D4EBDA2F-1760-4CD0-895D-303555F0BD7E","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"78db05e821e16d27258a3b6ca692279d0ff6a368","datavalue":{"value":"microfabrication","type":"string"},"datatype":"string"},"type":"statement","id":"Q4700816$F31AD154-FB70-417B-B6D6-951799903D0E","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"d4feed56f07a6f425efef39e07a9efc016157b47","datavalue":{"value":"multilayers","type":"string"},"datatype":"string"},"type":"statement","id":"Q4700816$13F05215-DF4F-47EB-B6EB-66183DD09D24","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"c18e6c1b3c19f894d27ebd944c31b0bb25507b94","datavalue":{"value":"photoresist","type":"string"},"datatype":"string"},"type":"statement","id":"Q4700816$ADC97FA6-C4D7-43F9-A323-F1E4BFBA3A47","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"8f3dfa733b3a0c757c769d12153a7e58f7556a5d","datavalue":{"value":"preconditioned Richardson method","type":"string"},"datatype":"string"},"type":"statement","id":"Q4700816$17FE962B-75F0-48B1-9FB7-2E8588940031","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"dda18a80948f2ebcd5782cf8fcc9075b2d538691","datavalue":{"value":"Poisson equation","type":"string"},"datatype":"string"},"type":"statement","id":"Q4700816$F9B20CA3-83ED-48AE-B7B6-9E889F87CA8A","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"f37ad2700e39471dc05f0e670d86e755ed83ab82","datavalue":{"value":"domain decomposition algorithm","type":"string"},"datatype":"string"},"type":"statement","id":"Q4700816$613634C6-1911-4C67-86AE-DAB2C98F2F27","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q4700816$6789F503-3B3F-4000-A583-F737FEA8D3C2","rank":"normal"}],"P205":[{"mainsnak":{"snaktype":"value","property":"P205","hash":"9b2b09aeea08fd473fb5f572acf2f79101bccb4f","datavalue":{"value":"https://doi.org/10.1108/09615539810213188","type":"string"},"datatype":"url"},"type":"statement","id":"Q4700816$A2395971-0923-4661-9503-A08909C1118D","rank":"normal"}],"P388":[{"mainsnak":{"snaktype":"value","property":"P388","hash":"55661fb6208bffef83d6386ad45a63e5af7cc767","datavalue":{"value":"W1988190738","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q4700816$33EA873A-6336-4C09-A521-C513DEF7E105","rank":"normal"}],"P223":[{"mainsnak":{"snaktype":"value","property":"P223","hash":"a149b854db271362a36dba12ac2f4e011b75c419","datavalue":{"value":{"entity-type":"item","numeric-id":4504696,"id":"Q4504696"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q4700816$50A68E8C-EBAB-4FF0-BE01-6FD92E7830A0","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"e26e57358d58543dc611cba179e3ac3760b63fbb","datavalue":{"value":{"entity-type":"item","numeric-id":1892460,"id":"Q1892460"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q4700816$69645314-0474-4C19-9D20-BA2EED289209","rank":"normal"}],"P1643":[{"mainsnak":{"snaktype":"value","property":"P1643","hash":"72672f8bf1f085003b4af85d6aee7f45d4cac639","datavalue":{"value":{"entity-type":"item","numeric-id":4952969,"id":"Q4952969"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"61b643bc894ecb5880d7a634d2d89cec563d3a82","datavalue":{"value":{"amount":"+0.90417343","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ba354e87a58191d58d132c60481c945a3234ce85","datavalue":{"value":{"entity-type":"item","numeric-id":6534273,"id":"Q6534273"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q4700816$1B2677F8-E09C-4E1C-955C-D7FFFCC7AE8D","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"2d783e457358d7b7d54b921bccced4c47649a5ea","datavalue":{"value":{"entity-type":"item","numeric-id":674709,"id":"Q674709"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"9ec8be677e4e09596110a4db411177343ad19138","datavalue":{"value":{"amount":"+0.83623815","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ba354e87a58191d58d132c60481c945a3234ce85","datavalue":{"value":{"entity-type":"item","numeric-id":6534273,"id":"Q6534273"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q4700816$FF7D7133-1EED-4949-82CE-B5D4C87DC3F6","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"8f94e0588857ee404ac301acae8f73752cc5502f","datavalue":{"value":{"entity-type":"item","numeric-id":5956667,"id":"Q5956667"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"a6c973d61a5fbd72b698c4553e58de833d7c628e","datavalue":{"value":{"amount":"+0.8323819","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ba354e87a58191d58d132c60481c945a3234ce85","datavalue":{"value":{"entity-type":"item","numeric-id":6534273,"id":"Q6534273"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q4700816$C83D9558-56FC-4B24-9E54-001A7D33D061","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"4b1b45af7637cb604cf6d339afe3d586263e6f9a","datavalue":{"value":{"entity-type":"item","numeric-id":4502402,"id":"Q4502402"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"58a5fdddf7eb267ad7d2014347f4ee9f2e196010","datavalue":{"value":{"amount":"+0.83227307","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ba354e87a58191d58d132c60481c945a3234ce85","datavalue":{"value":{"entity-type":"item","numeric-id":6534273,"id":"Q6534273"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q4700816$697EA54D-3964-45F3-848E-1DB3D2BB97A7","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"3c95c0d90b04c0d02664bdc30d32ee1fb7717fa6","datavalue":{"value":{"entity-type":"item","numeric-id":2512455,"id":"Q2512455"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"a889f7499faeb6e56378b0f82444321165b75439","datavalue":{"value":{"amount":"+0.8270533","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ba354e87a58191d58d132c60481c945a3234ce85","datavalue":{"value":{"entity-type":"item","numeric-id":6534273,"id":"Q6534273"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q4700816$8CAA5F1E-76F4-4A7B-A35E-B04F7003DB9B","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"58ab81694f1da5a447510f946be72f51b8e7851d","datavalue":{"value":{"entity-type":"item","numeric-id":3352756,"id":"Q3352756"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"493596f5b1ade13c0cd9af1c7ab8f684b6a6e7a9","datavalue":{"value":{"amount":"+0.82668096","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ba354e87a58191d58d132c60481c945a3234ce85","datavalue":{"value":{"entity-type":"item","numeric-id":6534273,"id":"Q6534273"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q4700816$98B4C678-3A69-4434-B619-6194499D3053","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"1959b747c8d511726a35c78586bd0dd1c985e315","datavalue":{"value":{"entity-type":"item","numeric-id":3065201,"id":"Q3065201"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"d267e2711527f0935d8260c3cb9814cac57a5764","datavalue":{"value":{"amount":"+0.8238534","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ba354e87a58191d58d132c60481c945a3234ce85","datavalue":{"value":{"entity-type":"item","numeric-id":6534273,"id":"Q6534273"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q4700816$898C6F0D-CB76-430D-9D87-5C9162126F7C","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"525bdb5de4d43a2c6b5e2cf41639cdcc7288a29d","datavalue":{"value":{"entity-type":"item","numeric-id":1567012,"id":"Q1567012"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"c3dfc6f437a88923916b39dbf941abcb9dfbe74c","datavalue":{"value":{"amount":"+0.8187681","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ba354e87a58191d58d132c60481c945a3234ce85","datavalue":{"value":{"entity-type":"item","numeric-id":6534273,"id":"Q6534273"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q4700816$306CD3A3-3872-427C-AC40-3EEE418C3127","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"7bc7bb1b766a97459d6bbf5776c6bd101a02042c","datavalue":{"value":{"entity-type":"item","numeric-id":5451535,"id":"Q5451535"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"0493828f453395b8e85fbfa8becbbc915a56ce5e","datavalue":{"value":{"amount":"+0.81827915","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"ba354e87a58191d58d132c60481c945a3234ce85","datavalue":{"value":{"entity-type":"item","numeric-id":6534273,"id":"Q6534273"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q4700816$8A660125-772E-4E37-8963-7628818F2B13","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Publication:4700816","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Publication:4700816"}}}}}