{"entities":{"Q5130831":{"pageid":7160403,"ns":120,"title":"Item:Q5130831","lastrevid":94329626,"modified":"2026-06-05T06:32:02Z","type":"item","id":"Q5130831","labels":{"en":{"language":"en","value":"Static, free and forced vibration analysis of a delaminated microbeam-based MEMS subjected to the electrostatic force"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 7268357"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5130831$D62482CB-8324-4763-94CB-F7775751EAD8","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"62c83a46259a10d2a89197b72db4bc48b87843f0","datavalue":{"value":"1454.74105","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q5130831$8CDCB25B-18A5-4031-AA68-54D4BDA13225","rank":"normal"}],"P16":[{"mainsnak":{"snaktype":"value","property":"P16","hash":"9575981075c3985552365e0e5fac3cb216ea6df5","datavalue":{"value":{"entity-type":"item","numeric-id":5130829,"id":"Q5130829"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5130831$C0A244E5-D6B3-4669-9E3E-EAC3DDC28D03","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"16e5a14f0bd14074300e0d6c838c77cce16cdf69","datavalue":{"value":{"entity-type":"item","numeric-id":5130830,"id":"Q5130830"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5130831$54B6E15B-FF2E-4458-A22D-DC9CA064EA4A","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"ac63d59e8eae8acde1a79990ded10d9c08c58bb2","datavalue":{"value":{"entity-type":"item","numeric-id":2854457,"id":"Q2854457"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5130831$123BC0A1-345F-44D3-A031-F7226C5900B5","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"22ec0f91e40bf992ff58cd9bd41a8919d37df262","datavalue":{"value":{"entity-type":"item","numeric-id":1956416,"id":"Q1956416"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5130831$D6151840-326D-4EB2-927F-DCE5C3F951AB","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"9a06559dad485452a1744556521b1b7e9eb99e2a","datavalue":{"value":{"time":"+2020-10-29T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q5130831$37CA6EB9-E50B-453D-9BDA-EF24F3C5AD63","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"0af2384f59d305b536c5167725f2ab9aa5f764a2","datavalue":{"value":"74K10","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q5130831$9C60B726-5D53-492C-8A4A-022646812E3D","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"19dd37a52c0c8850c34e08b30677f4ec61743ea5","datavalue":{"value":"74E30","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q5130831$2EAB8CFB-048F-48BA-878D-4C725B2C156F","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"dabd1caf0a41fb6b96164127b6097eac8dd3a121","datavalue":{"value":"74F15","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q5130831$B6FD6C83-B37E-449C-B1B1-D39A5DAE7BE1","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"58952d0dc104329cd7f0487605a71075268121c3","datavalue":{"value":"74H45","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q5130831$4CC9CFA8-F386-4273-AB1D-094C4999BBDA","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"314640d948b3dbd7a663d440e993f2e79eb72339","datavalue":{"value":"74R99","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q5130831$EE7AE044-A1E4-410B-88C1-59E2179257C8","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"aa85236acb4e71f9158dec1660bde7b24f5e7531","datavalue":{"value":"74M25","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q5130831$676F86AC-A741-408A-A6D0-CCB70B117C1A","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"54079efba10378ba39c023536aa9a6fe83772333","datavalue":{"value":"7268357","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q5130831$588C16B2-ADFE-43BE-9CFE-01E21B874311","rank":"normal"}],"P1450":[{"mainsnak":{"snaktype":"value","property":"P1450","hash":"6e5715acc96ce1be95eb18b3777fa1f90dcba1aa","datavalue":{"value":"static deflection","type":"string"},"datatype":"string"},"type":"statement","id":"Q5130831$8387AA85-E3B9-464D-B2CA-71EA391AD6EA","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"59d2a9dddedf6316a6a6bc6e7d35dcf7a6f3e041","datavalue":{"value":"pull-in voltage","type":"string"},"datatype":"string"},"type":"statement","id":"Q5130831$4F261E51-D7CA-4E9A-B34B-C44C53AFD285","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"75ec697c3beabca36b34ff4d7afd3f9363c35417","datavalue":{"value":"Euler-Bernoulli beam","type":"string"},"datatype":"string"},"type":"statement","id":"Q5130831$43A0EF2C-70A4-4BFB-8DDF-894585D77682","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"4419e8c26af7c3681ea719eae7985f1ccf43b1c9","datavalue":{"value":"reduced-order model","type":"string"},"datatype":"string"},"type":"statement","id":"Q5130831$3268FC38-09B3-4907-BBC2-B6EF73E5666B","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"c1b5ded3b6c4dd4a35349c23c440bd20e5491187","datavalue":{"value":"Galerkin decomposition method","type":"string"},"datatype":"string"},"type":"statement","id":"Q5130831$42345DC3-96A4-4A96-9FC9-B2AB0CCCA05D","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5130831$175CE90F-2AB9-4A25-9424-D061E929A21D","rank":"normal"}],"P205":[{"mainsnak":{"snaktype":"value","property":"P205","hash":"14f46d01db2a4ed417ee3743e052de7fff93b805","datavalue":{"value":"https://am.ippt.pan.pl/am/article/view/v72p169","type":"string"},"datatype":"url"},"type":"statement","id":"Q5130831$3B9C9C53-AE67-49E0-AD76-AB8652D03B2A","rank":"normal"}],"P388":[{"mainsnak":{"snaktype":"value","property":"P388","hash":"60445b800ceedf392cc3a08072dda3b4232fdecb","datavalue":{"value":"W3026817864","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q5130831$F1EB0E60-AECA-4BB4-89F9-53B6DF6F8725","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"165e1d7070101b9d7a34325397b2117a2d016d64","datavalue":{"value":{"text":"Static, free and forced vibration analysis of a delaminated microbeam-based MEMS subjected to the electrostatic force","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q5130831$2AA17675-83F1-4A3D-91F5-184795CF101E","rank":"normal"}],"P223":[{"mainsnak":{"snaktype":"value","property":"P223","hash":"c846796161f4994a71f389dcbf15576c12b5714b","datavalue":{"value":{"entity-type":"item","numeric-id":969343,"id":"Q969343"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5130831$8183076C-E2C9-4664-92ED-10129A9CAF8D","rank":"normal"}],"P27":[{"mainsnak":{"snaktype":"value","property":"P27","hash":"fd201ace9e8245fa9fc4b46a2e899eed495ad927","datavalue":{"value":"10.24423/AOM.3529","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q5130831$F9322AFA-09AA-4585-983F-79841B9B8D50","rank":"normal"}],"P1643":[{"mainsnak":{"snaktype":"value","property":"P1643","hash":"61f368ead43a5183cc51c34f912501b0107ffcd3","datavalue":{"value":{"entity-type":"item","numeric-id":362909,"id":"Q362909"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"1464e413d9ddb1d0847246ee00a79808ccaf5917","datavalue":{"value":{"amount":"+0.7896091341972351","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q5130831$4C9AD833-E305-43CC-9487-79382816908F","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"5cbd8d03093daef98793e330baf85f92a498944e","datavalue":{"value":{"entity-type":"item","numeric-id":2360341,"id":"Q2360341"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"771ad6f7b4c3f25d47defbf1074bbb2521723afa","datavalue":{"value":{"amount":"+0.7664690613746643","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q5130831$3F5B103F-F794-4F1B-AE15-C72D60443344","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"0f2febbdf169abf5bbe24db775fad05ec1aa9a56","datavalue":{"value":{"entity-type":"item","numeric-id":2285381,"id":"Q2285381"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"d2242de59d35e98de7421064f1c1a3e511122f84","datavalue":{"value":{"amount":"+0.7594385147094727","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q5130831$4F635EAC-B96C-4FC1-920D-FA572EFA2BA4","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"ae40bbcb0621bc2c70ec31703a5c7db389953175","datavalue":{"value":{"entity-type":"item","numeric-id":5119757,"id":"Q5119757"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"e148a997ada8e848f304767347250900f05b099c","datavalue":{"value":{"amount":"+0.7578067779541016","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q5130831$31830EE8-53CA-4CB8-ADD1-CFF8C7878E54","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"20fe948a71ca731803433ed46d4932f0c80deeb1","datavalue":{"value":{"entity-type":"item","numeric-id":1742330,"id":"Q1742330"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"f90fd8f01c0139e4f691b535f6a6a8a8bae364ee","datavalue":{"value":{"amount":"+0.7561458349227905","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q5130831$5D6D1AAE-7AB2-4181-8946-545010AE6249","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Static, free and forced vibration analysis of a delaminated microbeam-based MEMS subjected to the electrostatic force","badges":[]}}}}}