{"entities":{"Q5758317":{"pageid":7787868,"ns":120,"title":"Item:Q5758317","lastrevid":50155694,"modified":"2026-01-13T07:11:23Z","type":"item","id":"Q5758317","labels":{"en":{"language":"en","value":"Design framework for high-performance optimal sampled-data control with application to a wafer stage"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 5186149"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$DEB12B1C-6799-4D53-B3D2-8FF5B09DF51D","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"e7f1b7865f316e6c81aee8c66fd62ee4c1cc073c","datavalue":{"value":{"text":"Design framework for high-performance optimal sampled-data control with application to a wafer stage","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q5758317$07021F00-0650-487C-9B20-D76786DB5C03","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"93bf08490763d893711fb9aec4a1ed59da80d344","datavalue":{"value":"1124.93017","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q5758317$9C20D533-BA24-401D-8297-1B7F58BE36E1","rank":"normal"}],"P27":[{"mainsnak":{"snaktype":"value","property":"P27","hash":"69b834b01a169165efdeb07ef1f81e4106d5707b","datavalue":{"value":"10.1080/00207170701216329","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q5758317$4C413F8C-8893-4D96-82A2-07937F77358E","rank":"normal"}],"P200":[{"mainsnak":{"snaktype":"value","property":"P200","hash":"8fd1f09f03b2151af9bae64b3990df459d820d19","datavalue":{"value":{"entity-type":"item","numeric-id":159993,"id":"Q159993"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$95D24D48-1607-408D-9BA0-2A7DFA57F979","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"d4ccb5809271d2f0bf96f65b85084aa847fe92ef","datavalue":{"value":{"time":"+2007-09-03T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q5758317$DF4444F6-F0F2-467A-A173-0584E4CE17A7","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"f47b8551cfcd2e27e18ae083a8521741e193efcd","datavalue":{"value":"93B30","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q5758317$A09FEF65-5355-4685-96FC-7CE8BF768BC2","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"0865fb7043e066374ab3ed0ebe0fcf43197958c5","datavalue":{"value":"93B60","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q5758317$08E741A0-20B5-40FE-A114-2003E5380B1E","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"18457c8394a4b6201dcccd409d083d717a8c4e70","datavalue":{"value":"93C57","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q5758317$E6261357-C682-4B7C-B555-50F346898F71","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"89e39262c241f27bf2327515221fe38b897585be","datavalue":{"value":"5186149","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q5758317$8EAE7241-4388-498E-841F-2AD3A698BAB2","rank":"normal"}],"P1450":[{"mainsnak":{"snaktype":"value","property":"P1450","hash":"4cd63d506a4c13107a3aed9bb746e28db1fe5bb1","datavalue":{"value":"control design","type":"string"},"datatype":"string"},"type":"statement","id":"Q5758317$DB451EBD-6C7F-424F-8A75-762F38F29668","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"458d219e28e4b2d7e4c2a7d8cd5ad0d529c4e9b8","datavalue":{"value":"high-performance sampled-data systems","type":"string"},"datatype":"string"},"type":"statement","id":"Q5758317$D68468DE-3878-43F1-8000-19EBE35D0CD3","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"3416f63cc51895f4263572703c4ac05ae0b328ea","datavalue":{"value":"system identification techniques","type":"string"},"datatype":"string"},"type":"statement","id":"Q5758317$B575CD00-7F87-4718-943C-D2E9F3494702","rank":"normal"}],"P1463":[{"mainsnak":{"snaktype":"value","property":"P1463","hash":"d1e2f4b62458eb2d9457563b6ead5c1e8dffc3c9","datavalue":{"value":{"entity-type":"item","numeric-id":31333,"id":"Q31333"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$6933008C-9A11-40B5-9C2F-94605EB80E52","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$7F57D73B-D39F-4A60-A998-A57226CD68D9","rank":"normal"}],"P205":[{"mainsnak":{"snaktype":"value","property":"P205","hash":"c9923748ff320fb531ba45f586ed259b4755988d","datavalue":{"value":"https://doi.org/10.1080/00207170701216329","type":"string"},"datatype":"url"},"type":"statement","id":"Q5758317$D349DC51-5CBC-4739-B09F-713BCC672D8F","rank":"normal"}],"P388":[{"mainsnak":{"snaktype":"value","property":"P388","hash":"fc462b912f1f4848d894591af95a43c499a53d1f","datavalue":{"value":"W2114450850","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q5758317$30EC694A-F6B2-4EAC-B57F-82741C626123","rank":"normal"}],"P223":[{"mainsnak":{"snaktype":"value","property":"P223","hash":"fa32cc574f88af16c0bf93a0dc5470bfca3f1d56","datavalue":{"value":{"entity-type":"item","numeric-id":1915025,"id":"Q1915025"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$4F732C95-CF7C-4567-9EF0-714DEFC3E5D7","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"9d95ae940d8f43dc51b6003b3de60fdf9d619adb","datavalue":{"value":{"entity-type":"item","numeric-id":795783,"id":"Q795783"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$8F1B4EED-D5F7-416F-8499-49C056C05CF8","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"e3d49a2f040bfb966932bed7946c1314df967794","datavalue":{"value":{"entity-type":"item","numeric-id":5266888,"id":"Q5266888"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$78F86389-48C3-4A2A-9BBD-7DD1376975F3","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"9ced9f630c3a2563bc51244234d09ad595b85473","datavalue":{"value":{"entity-type":"item","numeric-id":1199065,"id":"Q1199065"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$DF74D82D-4463-47ED-9129-0B4EC5A0BAF9","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"b59dab004541e99ed6b0a32ec37d2aeaed45c153","datavalue":{"value":{"entity-type":"item","numeric-id":4004759,"id":"Q4004759"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$5494CEA4-CCD3-480D-A14D-77CC203BA3E3","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"cdee85f5040c59d30d34faf7d138ca5a3b70845e","datavalue":{"value":{"entity-type":"item","numeric-id":3140193,"id":"Q3140193"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$FADBD888-6CA8-4C25-AE19-C128AE9E0D6D","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"e1dfb41da150dbad091a53ed9aeb791e01306a2c","datavalue":{"value":{"entity-type":"item","numeric-id":1186850,"id":"Q1186850"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$B95DEF9C-C885-4A83-9AD9-BBEC94438B6F","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"53199ca9062d2bba81a12f9354d02fd8801425d0","datavalue":{"value":{"entity-type":"item","numeric-id":5273935,"id":"Q5273935"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$B8BD8F6C-D9B1-4C2B-BA42-2E687278B9DB","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"115d7b9b95dd367f9d79ffe6ed7fdbe53c5c42b8","datavalue":{"value":{"entity-type":"item","numeric-id":3912440,"id":"Q3912440"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$A84FC395-A0EF-4F17-BCE7-63474D172CE0","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"112a2d8dd3cd7ff7c5b30b14995dbaa0fae06b39","datavalue":{"value":{"entity-type":"item","numeric-id":3476681,"id":"Q3476681"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$7F5AEC5E-BBA6-4978-A388-15D434E6DC3F","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"39827dd06bf83106838007ed87e374e83cd91e3e","datavalue":{"value":{"entity-type":"item","numeric-id":1182440,"id":"Q1182440"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$1FE97D72-2A7F-40B0-8D69-7654407BA6FB","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"a6a1ad40a17160988c3fdbd7208481a60b9a1b08","datavalue":{"value":{"entity-type":"item","numeric-id":4844535,"id":"Q4844535"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$9142A1C3-93B5-4929-876A-D9A0671B105A","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"dd79eaf0aa8ff0b3c226a3e1d2a5a6bbef6e51f0","datavalue":{"value":{"entity-type":"item","numeric-id":1333437,"id":"Q1333437"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$A1AC90A3-A8FB-4794-95FE-CDDE8C50554B","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"1ad5b3820e7d52117c2569f1c7010275bd10cf38","datavalue":{"value":{"entity-type":"item","numeric-id":3979743,"id":"Q3979743"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$5745EC08-8AA9-4DB0-A340-718B1CCC4A55","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"8e81bb63da3f60a0dbe13e48990e56537b482863","datavalue":{"value":{"entity-type":"item","numeric-id":3989596,"id":"Q3989596"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$B81FF448-0823-4AB1-ADFB-5658AB820411","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"f24703f59c6ac0e1bceabcb2299d88fc716aab24","datavalue":{"value":{"entity-type":"item","numeric-id":3994082,"id":"Q3994082"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$73D56D3E-8518-4028-9FEA-494F56185F7B","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"c15166cc00f143dd89e92268d0e018d1eadd52a6","datavalue":{"value":{"entity-type":"item","numeric-id":5274244,"id":"Q5274244"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$CA8322D3-C8B0-4C86-83DD-D326169432D9","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"ac9bbbf7927b33cbbd107e04cf83262059916796","datavalue":{"value":{"entity-type":"item","numeric-id":3804537,"id":"Q3804537"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$CA037C35-AFB0-4494-A040-9D82DAC35A30","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"d24633649cca8848490af5bc69e68acfb20713a4","datavalue":{"value":{"entity-type":"item","numeric-id":4876582,"id":"Q4876582"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$AD26759A-32DD-4139-80C2-144F7E061346","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"7683e18b49b6552618fa495ed3550339c18b509d","datavalue":{"value":{"entity-type":"item","numeric-id":1301398,"id":"Q1301398"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q5758317$DF559DE2-BA2F-4F30-BD6E-206F57E9FFE5","rank":"normal"}],"P1643":[{"mainsnak":{"snaktype":"value","property":"P1643","hash":"71326abd7e63cb9d65c01f370f5e1be6626ef749","datavalue":{"value":{"entity-type":"item","numeric-id":4013331,"id":"Q4013331"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"07daecfde58049c7035470bcd32caa0850dda4d6","datavalue":{"value":{"amount":"+0.7602531909942627","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q5758317$034E151D-4A20-46FA-9C1B-F3AC3EAD99DB","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"53e6a28064ac7ac6c729715af13dd688fd005f5b","datavalue":{"value":{"entity-type":"item","numeric-id":1902290,"id":"Q1902290"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"c059ee43157e330267acfeb6af1b7aad872aa2aa","datavalue":{"value":{"amount":"+0.757942259311676","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q5758317$E663D03D-4C57-4337-84D7-5BB057EFC423","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"ddff31dd2fed89b95621bd30cb4011cf5f01f716","datavalue":{"value":{"entity-type":"item","numeric-id":1190500,"id":"Q1190500"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"876df90ae417079fa9646dd95f29db1f5cc6b4cf","datavalue":{"value":{"amount":"+0.7501932382583618","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q5758317$E9444BA5-705D-444B-A58B-26B1115B8139","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"a7e0b98eeea98ce150de65c34ba3b95dac27a69f","datavalue":{"value":{"entity-type":"item","numeric-id":4004760,"id":"Q4004760"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"0173cff77c4971b13adcc15c42576ae951d8a950","datavalue":{"value":{"amount":"+0.7485039830207825","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q5758317$6BD55B4C-40D3-4956-BA6B-920963296B41","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"f19ab3a1674100fdff34772635411843d00d025e","datavalue":{"value":{"entity-type":"item","numeric-id":3985337,"id":"Q3985337"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"7f394887eeb9849d8065a66ad5369efb9cfecddf","datavalue":{"value":{"amount":"+0.74737149477005","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q5758317$D4D0D011-9FA7-4583-BC8A-A2611656D85E","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Publication:5758317","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Publication:5758317"}}}}}