{"entities":{"Q6565207":{"pageid":14176362,"ns":120,"title":"Item:Q6565207","lastrevid":55699240,"modified":"2026-02-17T21:16:17Z","type":"item","id":"Q6565207","labels":{"en":{"language":"en","value":"Topology optimization for optical microlithography with partially coherent illumination"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 7874317"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q6565207$719086A6-D0B9-4E95-93BC-FA85AB907148","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"48af5cbee8a1c279b3319b968d033ec8083288ca","datavalue":{"value":{"text":"Topology optimization for optical microlithography with partially coherent illumination","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q6565207$BD420C0C-855A-4FA7-83EE-1CD7A0F8D03E","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"636df8014d9c40a0d49140e144214058913d1650","datavalue":{"value":"1548.74635","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q6565207$87E192EA-C427-4655-A203-07BA63A79ACF","rank":"normal"}],"P16":[{"mainsnak":{"snaktype":"value","property":"P16","hash":"30351a974a03a8560fa34b2b2062fb04c18d6260","datavalue":{"value":{"entity-type":"item","numeric-id":381858,"id":"Q381858"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q6565207$4AC0056A-7176-45A3-8DE8-EEF3930622CD","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"4befb32fcb5fb9d1f42c5c225345308846b72b2c","datavalue":{"value":{"entity-type":"item","numeric-id":1667253,"id":"Q1667253"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q6565207$F50BA6CA-80A9-44AB-AC2D-854131795C43","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"5ac5196060f3d4516d404bcd7bc56453dc36b8c6","datavalue":{"value":{"entity-type":"item","numeric-id":361958,"id":"Q361958"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q6565207$63CFECB3-8510-4041-A41C-A83BE8ECBFE7","rank":"normal"}],"P200":[{"mainsnak":{"snaktype":"value","property":"P200","hash":"8e55500092d01ebde211f317fcfcc88bbf334db0","datavalue":{"value":{"entity-type":"item","numeric-id":2709671,"id":"Q2709671"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q6565207$A5A5B171-E090-418B-A6E7-E1A42D07567E","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"8ad38fe45e736da7b933e7fb9aab0b9eb039636d","datavalue":{"value":{"time":"+2024-07-01T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q6565207$B017CB81-DC6B-4E3B-B365-A8C1C913DA66","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"67feb795097560851ec20018b8a8a31cd406a868","datavalue":{"value":"74P15","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q6565207$D69EE274-584E-4C53-B924-A466D70F46AB","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"fc52dc49d9ee943f4951e5dc0aad58b55973e3e2","datavalue":{"value":"7874317","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q6565207$E8420872-1AC5-4AB6-A503-AC5547A308DA","rank":"normal"}],"P1450":[{"mainsnak":{"snaktype":"value","property":"P1450","hash":"70325e61dd4d819c211cbd1ffcd433d91910ae00","datavalue":{"value":"topology optimization","type":"string"},"datatype":"string"},"type":"statement","id":"Q6565207$3C3AD433-BADF-4CC8-AB96-1B1CF7FAACBE","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"d68b1091ca158ffa35e638911cd23d827f7e2d1f","datavalue":{"value":"optical microlithography","type":"string"},"datatype":"string"},"type":"statement","id":"Q6565207$DE213868-5E26-42C7-8EDE-79EB04D33C55","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"2cb956415c2335fe55e10b44337c305c6f3672e4","datavalue":{"value":"partially coherent illumination","type":"string"},"datatype":"string"},"type":"statement","id":"Q6565207$B7413773-34E8-4DD6-A896-ACEC860F1D1C","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"646bdad5315eea304e679005f252a59e6770ec90","datavalue":{"value":"robust source and mask optimization","type":"string"},"datatype":"string"},"type":"statement","id":"Q6565207$BF5010C5-64F8-4818-8085-25E1470859A4","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"6d73e274cdff7b51c85fecab63aee59faddb1f93","datavalue":{"value":"MEMS","type":"string"},"datatype":"string"},"type":"statement","id":"Q6565207$326AC466-657A-4C2E-A7EB-6FD2B42A12F1","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q6565207$0CE17A2A-E0E7-4C33-8B8B-497E8356FA1C","rank":"normal"}],"P223":[{"mainsnak":{"snaktype":"value","property":"P223","hash":"60b5d2742f25393642ef8d4c2a8d285a64c8a585","datavalue":{"value":{"entity-type":"item","numeric-id":5370244,"id":"Q5370244"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q6565207$203D71D3-6CA4-4467-B8C4-F3C0ACC7715E","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"fd977adc015217d7f44b8c007993201f52a2fb43","datavalue":{"value":{"entity-type":"item","numeric-id":1119431,"id":"Q1119431"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q6565207$580E59C1-9D6D-483B-95A6-81E93E71E84A","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"7169403de302d0ca6f674a5d3d795be5f1c94bf3","datavalue":{"value":{"entity-type":"item","numeric-id":5311955,"id":"Q5311955"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q6565207$DC4C2072-DE25-4793-B77F-B66655CC5EC5","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"9e5d0a8eb7744307b34b415e6d0ebfa2bc03868f","datavalue":{"value":{"entity-type":"item","numeric-id":381461,"id":"Q381461"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q6565207$7A76C0B7-A2BD-44BB-8271-EAEDBDC9ECE3","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"76cb71178203c1d20639fa29c54d1905fcfbd1c0","datavalue":{"value":{"entity-type":"item","numeric-id":2912286,"id":"Q2912286"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q6565207$84A0DAE5-A667-4479-9226-B521E751EAD5","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"5045aab5165d4bdadb933ccff8f1394ba6780bca","datavalue":{"value":{"entity-type":"item","numeric-id":381875,"id":"Q381875"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q6565207$B3EE9331-38EB-464E-94B3-47A0721A2BA3","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"86fea855244d5456e9a243bef8117b8d566a1556","datavalue":{"value":{"entity-type":"item","numeric-id":381607,"id":"Q381607"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q6565207$42F28C37-1DE6-4943-B9DD-2E99FE62AA7E","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"eea7a804e27e0aca1a369092d3cb64096f8eda08","datavalue":{"value":{"entity-type":"item","numeric-id":2712707,"id":"Q2712707"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q6565207$C40BB000-C7E1-4127-9262-918BDD7BD44D","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"63262031c7df79a9bc2715f65cb850386a09c434","datavalue":{"value":{"entity-type":"item","numeric-id":2720003,"id":"Q2720003"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q6565207$06EBB881-6C75-480E-B357-6E0A8653F8A5","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"24353926af3d0312cfd8c0145391dc10105aba50","datavalue":{"value":{"entity-type":"item","numeric-id":3738710,"id":"Q3738710"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q6565207$FDFACB74-652D-48BA-9147-9D7CAD32635C","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"469abe9c4236458da8d73ee35265e412d8267a24","datavalue":{"value":{"entity-type":"item","numeric-id":2632955,"id":"Q2632955"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q6565207$96533D0A-7534-4963-A9E8-4FDD8CDE42A7","rank":"normal"}],"P27":[{"mainsnak":{"snaktype":"value","property":"P27","hash":"60967cb4682834a1c647ea33b99e0e724e018ee0","datavalue":{"value":"10.1002/NME.5299","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q6565207$EFDF05BA-1152-49B4-8A7B-B2FF42256797","rank":"normal"}],"P1643":[{"mainsnak":{"snaktype":"value","property":"P1643","hash":"59715077103836a38b6cd2c198c78d899fc9c847","datavalue":{"value":{"entity-type":"item","numeric-id":361959,"id":"Q361959"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"59b5ac87af94f8375a809ec9d5f644e673b7f8e4","datavalue":{"value":{"amount":"+0.7447535395622253","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q6565207$2A97CC71-98BD-4E7D-9400-CE605404A1A7","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"64485243d71c9148eb062a765d0988b384b471a2","datavalue":{"value":{"entity-type":"item","numeric-id":2222369,"id":"Q2222369"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"2f291d29561da9ade8320bafba3a2e4639e80d2d","datavalue":{"value":{"amount":"+0.6890178322792053","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q6565207$7B030C78-E4E3-40CA-BB54-1611479445A0","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"c057081515d9ee07d704996cc8e5076c9a2b5e37","datavalue":{"value":{"entity-type":"item","numeric-id":2952118,"id":"Q2952118"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"d8b7d8e5aa72de4e1665e65b067ba2f9e6773441","datavalue":{"value":{"amount":"+0.6855794191360474","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q6565207$0A0746D5-9AEC-4D50-B657-B7E55B11EC6D","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"f76d7288b92dbfb50c87819c3382b1c2d97d0410","datavalue":{"value":{"entity-type":"item","numeric-id":423487,"id":"Q423487"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"35fa24908e550d4abb8acddc8f6c7ff6cbad960a","datavalue":{"value":{"amount":"+0.6798279881477356","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q6565207$5F1536A9-B534-41D2-9E45-ADE308DA8735","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"9f3268a4356ace1ac28a88ac3d67c825433d77d4","datavalue":{"value":{"entity-type":"item","numeric-id":2071416,"id":"Q2071416"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"93617ef10a743855af7dc579ad55788d3cadc46d","datavalue":{"value":{"amount":"+0.6795036196708679","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q6565207$00318D2B-308B-47EA-A2ED-6E8D80C83BBB","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Publication:6565207","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Publication:6565207"}}}}}