{"entities":{"Q926864":{"pageid":928712,"ns":120,"title":"Item:Q926864","lastrevid":50361734,"modified":"2026-01-13T21:43:14Z","type":"item","id":"Q926864","labels":{"en":{"language":"en","value":"On the partial differential equations of electrostatic MEMS devices. III: Refined touchdown behavior"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 5277636"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$825AF58C-3B23-4A86-A12E-BC8B3A868EDB","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"af8931c56dccab33567d2f1e0d9b5c34020ced6e","datavalue":{"value":{"text":"On the partial differential equations of electrostatic MEMS devices. III: Refined touchdown behavior","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q926864$FA3EB1CC-2F62-4A81-80FE-79C44CD3AE25","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"461659f0aac33ea2922c1b70a6687f1935e9c2e2","datavalue":{"value":"1146.35049","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q926864$DEB45014-5711-4265-A2E4-916FD464932F","rank":"normal"}],"P16":[{"mainsnak":{"snaktype":"value","property":"P16","hash":"be7a321e3361b83a26825d754a8d1e1de684f888","datavalue":{"value":{"entity-type":"item","numeric-id":274747,"id":"Q274747"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$C229A846-05DA-4C1C-AA3E-839967A1A7DD","rank":"normal"}],"P200":[{"mainsnak":{"snaktype":"value","property":"P200","hash":"dbc27535bfcb4e299a598bcfdfab0633ac07a0ef","datavalue":{"value":{"entity-type":"item","numeric-id":169790,"id":"Q169790"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$A874747B-0279-4BBD-BA00-F458C2EDC254","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"b02c7499d2bb572bac3375d3d0916f3e02aaf9a8","datavalue":{"value":{"time":"+2008-05-21T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q926864$2EE63626-B4E6-4249-BCFF-33821F5F39E1","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"d25c13c337e96543ffd849e38a9f8a38db3087f7","datavalue":{"value":"35K55","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q926864$5B1CCA98-5B36-4706-965B-86F9A9FB6193","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"bd6caedaf72266c98db78c0f0fa476e81b86921d","datavalue":{"value":"35B45","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q926864$38904A76-B9FF-458B-87D0-E0680F09120F","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"46233ee8b7937df2afd0eb5c5f0955a971cd1a67","datavalue":{"value":"35K65","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q926864$101CBA9D-D859-4B4E-A2E8-55248D19D51A","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"a66c6d7517563f3cd87d9c6a1ebd8759b79dc322","datavalue":{"value":"35Q72","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q926864$D0CEBD3E-8726-4E9D-B290-E80A42BA4FF2","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P226","hash":"3c6186c5032cb0ff3da0f39e039ac683c6aa2844","datavalue":{"value":"35B05","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q926864$B8D56512-579C-4864-96DB-B310A3123D0B","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"ae6a6263c7e609973bb41b9505d59f289c7ad880","datavalue":{"value":"5277636","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q926864$9F4C71CA-4164-4FBB-AC42-BE7BB61EDDB2","rank":"normal"}],"P1450":[{"mainsnak":{"snaktype":"value","property":"P1450","hash":"59d2a9dddedf6316a6a6bc6e7d35dcf7a6f3e041","datavalue":{"value":"pull-in voltage","type":"string"},"datatype":"string"},"type":"statement","id":"Q926864$773B6E20-AF4C-4961-9BB8-7B5165ACE1C3","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"6d73e274cdff7b51c85fecab63aee59faddb1f93","datavalue":{"value":"MEMS","type":"string"},"datatype":"string"},"type":"statement","id":"Q926864$1B3B1D46-7FF3-48AF-B3E2-A61EE3676878","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"d9c92b271e8f4bd54a82a92d07654e1ea0a6bc93","datavalue":{"value":"quenching profiles","type":"string"},"datatype":"string"},"type":"statement","id":"Q926864$433F422E-DA7C-434B-8EC9-F9835D0800B2","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"545cf2179203e58128183bfbc6a9fba610d67ba7","datavalue":{"value":"self-similar","type":"string"},"datatype":"string"},"type":"statement","id":"Q926864$41B34DBF-5AF8-4645-AE98-8DF294A531C1","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$908DCD0E-D435-415E-8B1B-FD506E56C730","rank":"normal"}],"P205":[{"mainsnak":{"snaktype":"value","property":"P205","hash":"4236d2342985c75215ed9b20c806bd552e179b79","datavalue":{"value":"https://doi.org/10.1016/j.jde.2008.02.005","type":"string"},"datatype":"url"},"type":"statement","id":"Q926864$A929A2A5-7BD0-4274-B7FB-20F1B247DA04","rank":"normal"}],"P388":[{"mainsnak":{"snaktype":"value","property":"P388","hash":"515d10152e0ff13a7e949f9388f73e1532c991c3","datavalue":{"value":"W1986032395","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q926864$F4A6C023-3939-43A5-8648-99E2D42D75C4","rank":"normal"}],"P223":[{"mainsnak":{"snaktype":"value","property":"P223","hash":"c9beb8b9e68de61b5e30f4b6027862063710d431","datavalue":{"value":{"entity-type":"item","numeric-id":5434618,"id":"Q5434618"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$4B12F127-F6C1-4EB2-87A2-D19A79AFCE31","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"96e111008ebd319f0fc32316b22a56ad539d609d","datavalue":{"value":{"entity-type":"item","numeric-id":3349244,"id":"Q3349244"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$B9091363-9483-42FD-8E74-0EC01076456D","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"49ac558d3e77f379672c0156db8ff4355bdd6965","datavalue":{"value":{"entity-type":"item","numeric-id":4036091,"id":"Q4036091"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$69FDBCD5-E7DC-43AF-B69C-863EF9159553","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"30a119405ac60e8328abc1409406c0dd5aa227ec","datavalue":{"value":{"entity-type":"item","numeric-id":3697477,"id":"Q3697477"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$4F9A3A81-630E-4BA7-A06A-4BB99806738F","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"9725f0bec82d191ccb72d179b377fff713072b58","datavalue":{"value":{"entity-type":"item","numeric-id":3435021,"id":"Q3435021"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$2AE65A90-180C-46FC-83F7-40D2F4FC80BA","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"430fdf67dfd92372d23c1905d346bf0d5fd3ffd0","datavalue":{"value":{"entity-type":"item","numeric-id":2640773,"id":"Q2640773"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$48D48F06-831A-44FE-9DDD-6681E16CC56D","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"9bc4fc9975a1d1e4165d7b6a78f02e07bc82bbae","datavalue":{"value":{"entity-type":"item","numeric-id":3987035,"id":"Q3987035"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$C4C3ED0A-37AC-48CC-9921-EB4DA559AE9E","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"3ec73f1a74e59d8488f26db4318a4fac51c471d3","datavalue":{"value":{"entity-type":"item","numeric-id":3593046,"id":"Q3593046"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$866FB50B-DE35-4E30-BEF6-F6FF8B8D0F58","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"ff843401bc1bbd66cbf17227b2c4fdcb43a01937","datavalue":{"value":{"entity-type":"item","numeric-id":927374,"id":"Q927374"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$AB66A620-7570-43BA-AF64-84AC2FB08ACD","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"d39b25f826abe532555480ca5253f59d18455121","datavalue":{"value":{"entity-type":"item","numeric-id":1021008,"id":"Q1021008"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$B09765E3-5F6F-403C-8812-A16C66ABE2DA","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"6a1bd484d2ada04d019c8f89b95bc99f460be0c1","datavalue":{"value":{"entity-type":"item","numeric-id":3710910,"id":"Q3710910"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$EBE5FBD7-1984-4E6E-8725-179E5D3D6445","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"6adfc52758d1d0f80f986dbc265a48bf2ed9430c","datavalue":{"value":{"entity-type":"item","numeric-id":3736159,"id":"Q3736159"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$43D5C81A-3087-455F-9719-B8BAACE31E62","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"328efc1176dbfa25fa306f10c83ef393d70f5a3d","datavalue":{"value":{"entity-type":"item","numeric-id":3482141,"id":"Q3482141"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$C9391656-3A85-4EC6-B4AF-03809DF3B1C4","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"a18fb331cff3d315065d22d2bfebe83c455d2fd1","datavalue":{"value":{"entity-type":"item","numeric-id":1135438,"id":"Q1135438"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$7BDC3055-2445-4775-91A7-75CCB6071937","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"6dee51ecde5bc3deeb672b30aea62b9a356199de","datavalue":{"value":{"entity-type":"item","numeric-id":5470266,"id":"Q5470266"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$EA60E511-D6EB-4601-A3D4-3C42CC05E281","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"b37087fcb0b3babe8b9786d292d22033dccdd58b","datavalue":{"value":{"entity-type":"item","numeric-id":5562267,"id":"Q5562267"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$4899E081-773A-4B7D-BD04-28CBEBC1C24E","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"29441ca28033a2fa6f50dcc8aa18a3cbd59b750e","datavalue":{"value":{"entity-type":"item","numeric-id":2783738,"id":"Q2783738"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$9C663BDD-B530-46EA-A445-EFD41655357B","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P223","hash":"9f04fcbf92307b41e5c5753e737ea2ce50502e5f","datavalue":{"value":{"entity-type":"item","numeric-id":4802400,"id":"Q4802400"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q926864$48383E2B-3A49-4F37-9EF8-EC9400B61F3A","rank":"normal"}],"P27":[{"mainsnak":{"snaktype":"value","property":"P27","hash":"0c12cf403dce6b6fc1a139d599d001c27d2378b0","datavalue":{"value":"10.1016/J.JDE.2008.02.005","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q926864$D054EE13-45CA-4CC0-ADF5-C4F4E2E2379B","rank":"normal"}],"P1643":[{"mainsnak":{"snaktype":"value","property":"P1643","hash":"694fc3f4d960172c76e5eb533b0eebd20c333fbe","datavalue":{"value":{"entity-type":"item","numeric-id":927374,"id":"Q927374"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"5dc58800488fa283f1c067c62c602a2cfd2f5d78","datavalue":{"value":{"amount":"+0.9601315259933472","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q926864$F9C13975-7D32-4513-90F1-A00CCAEFD4E1","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"1261ab907406fc1eac83556454ee28ec2310a90b","datavalue":{"value":{"entity-type":"item","numeric-id":3593046,"id":"Q3593046"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"c5951045a3685c69facf8b9150d6beabcaf8e4c9","datavalue":{"value":{"amount":"+0.8917850255966187","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q926864$1232FB75-5FF3-4950-9CC1-DE5FF43E401E","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"a12b980dd072a119fe8811042b3ae21abc5a949b","datavalue":{"value":{"entity-type":"item","numeric-id":3435021,"id":"Q3435021"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"dd723b1d0040aaf01e91624b38b1a0ef2f06c6c0","datavalue":{"value":{"amount":"+0.8808389902114868","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q926864$12C98781-6B73-43B5-8B85-A95EBFB91DAC","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"e5b655d2e33aad635f949ed7e860a04242b9c84a","datavalue":{"value":{"entity-type":"item","numeric-id":5470266,"id":"Q5470266"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"1bdcbeb07df9867d9ef2b586deecc3eddcda67e1","datavalue":{"value":{"amount":"+0.8712382316589355","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q926864$2C99BBE3-002F-45AA-BFC2-5C8BCE445394","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"d5105b2d85814bf17b17d38c9ca8bee25214748c","datavalue":{"value":{"entity-type":"item","numeric-id":2178052,"id":"Q2178052"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"87d6960ae64794fdfcaa56159cdd742d161c887c","datavalue":{"value":{"amount":"+0.8433611392974854","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q926864$B8B99FBB-4A02-4D11-A84E-F7945D98F294","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Publication:926864","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Publication:926864"}}}}}