{"entities":{"Q974890":{"pageid":976738,"ns":120,"title":"Item:Q974890","lastrevid":65767185,"modified":"2026-04-12T05:14:27Z","type":"item","id":"Q974890","labels":{"en":{"language":"en","value":"Development of a new simulation model of spin coating process and its application to optimize the 450 mm wafer coating process"}},"descriptions":{"en":{"language":"en","value":"scientific article; zbMATH DE number 5718069"}},"aliases":{},"claims":{"P31":[{"mainsnak":{"snaktype":"value","property":"P31","hash":"fd5912e4dab4b881a8eb0eb27e7893fef55176ad","datavalue":{"value":{"entity-type":"item","numeric-id":56887,"id":"Q56887"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q974890$1B993477-EE52-4F33-9E30-36595F903570","rank":"normal"}],"P159":[{"mainsnak":{"snaktype":"value","property":"P159","hash":"867e6f6141a3451bef7ece29c86d724d9f2c5e54","datavalue":{"value":{"text":"Development of a new simulation model of spin coating process and its application to optimize the 450 mm wafer coating process","language":"en"},"type":"monolingualtext"},"datatype":"monolingualtext"},"type":"statement","id":"Q974890$B32492F0-D573-4691-8BE2-B7E51508B797","rank":"normal"}],"P225":[{"mainsnak":{"snaktype":"value","property":"P225","hash":"1fe9181148e4e49b524a9f7dcfcc3f342b11612d","datavalue":{"value":"1305.76012","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q974890$2F38C1AF-CCC6-4255-B12B-DF74A2F4F9A2","rank":"normal"}],"P16":[{"mainsnak":{"snaktype":"value","property":"P16","hash":"ba111cf5872a7ec5d141d264dcb4a73885d2fd75","datavalue":{"value":{"entity-type":"item","numeric-id":856608,"id":"Q856608"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q974890$929180C7-9B9E-49C7-8C74-CDD105288924","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"b42e6741a5223ed8e9742e89a0da0e157bbaf368","datavalue":{"value":{"entity-type":"item","numeric-id":550749,"id":"Q550749"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q974890$8B1B782F-4DB7-4142-BF30-79052452AB7E","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P16","hash":"0ddeef440a9aff9a58992efa2f30acd4fcb57d3d","datavalue":{"value":{"entity-type":"item","numeric-id":550747,"id":"Q550747"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q974890$19554259-1EB7-4BA9-A8A1-7E5B41DF740E","rank":"normal"}],"P200":[{"mainsnak":{"snaktype":"value","property":"P200","hash":"4e448eb404c25c9080da91e0abfb6b589f67144f","datavalue":{"value":{"entity-type":"item","numeric-id":172654,"id":"Q172654"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q974890$6925BB06-2C8A-4FAE-BB89-5F5A5410A216","rank":"normal"}],"P28":[{"mainsnak":{"snaktype":"value","property":"P28","hash":"6b279eb78b634b5450dd135862ef228f6c0276a2","datavalue":{"value":{"time":"+2010-06-08T00:00:00Z","timezone":0,"before":0,"after":0,"precision":11,"calendarmodel":"http://www.wikidata.org/entity/Q1985727"},"type":"time"},"datatype":"time"},"type":"statement","id":"Q974890$CFDE1206-D12C-4997-A529-66B85BBCAA56","rank":"normal"}],"P226":[{"mainsnak":{"snaktype":"value","property":"P226","hash":"a204b32dfdb9c820e011e4758c7e06d9b5699f7c","datavalue":{"value":"76A20","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q974890$4207A644-3DED-4E3D-84C7-2B68BE2308FF","rank":"normal"}],"P1451":[{"mainsnak":{"snaktype":"value","property":"P1451","hash":"6f3d153a43f7463ebea2817192656b50c3bd2fda","datavalue":{"value":"5718069","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q974890$2BD579B8-756F-473C-87FD-26F2D35400CB","rank":"normal"}],"P1450":[{"mainsnak":{"snaktype":"value","property":"P1450","hash":"b2403fef3acf9f18699ba3dcc8aa68f72af1e89f","datavalue":{"value":"spin coating","type":"string"},"datatype":"string"},"type":"statement","id":"Q974890$1592F11A-3D68-4758-B14F-8425900CEC8F","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"c18e6c1b3c19f894d27ebd944c31b0bb25507b94","datavalue":{"value":"photoresist","type":"string"},"datatype":"string"},"type":"statement","id":"Q974890$BCA609CA-189A-4CA3-9843-01E243BEAD9B","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"fa4b2af1ba4ed9324a2f720ab69ff10311585356","datavalue":{"value":"photoresist consumption minimization","type":"string"},"datatype":"string"},"type":"statement","id":"Q974890$063B5ED1-9A4F-4BE5-B811-5435E3B36BAD","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1450","hash":"e15cfbebf6e06801c6d23b460c0ba66eee7305bc","datavalue":{"value":"wafer enlargement","type":"string"},"datatype":"string"},"type":"statement","id":"Q974890$0C1C809D-54A0-44C1-9143-2710D1D32208","rank":"normal"}],"P1460":[{"mainsnak":{"snaktype":"value","property":"P1460","hash":"57f7fea50d2ce1b39b695c4a1313582eed405e38","datavalue":{"value":{"entity-type":"item","numeric-id":5976449,"id":"Q5976449"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q974890$47189D1C-B679-443D-82E7-D9B2AFC878BD","rank":"normal"}],"P205":[{"mainsnak":{"snaktype":"value","property":"P205","hash":"e238e5aac314c050b4f5273ef504999ca983c1fe","datavalue":{"value":"https://doi.org/10.1016/j.ijheatmasstransfer.2010.01.018","type":"string"},"datatype":"url"},"type":"statement","id":"Q974890$22A846F9-689B-4C6F-81EA-D91587E123CF","rank":"normal"}],"P388":[{"mainsnak":{"snaktype":"value","property":"P388","hash":"eca80d51b5f99c9f96258dae971750a41314d84b","datavalue":{"value":"W2004666264","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q974890$AEB3CC87-D385-412F-983E-17FFDFBA247D","rank":"normal"}],"P223":[{"mainsnak":{"snaktype":"value","property":"P223","hash":"af0885f13c71c5ed74cc8414315b3d244a4c534e","datavalue":{"value":{"entity-type":"item","numeric-id":3248491,"id":"Q3248491"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","id":"Q974890$145E53D0-0194-422F-8D19-2209E9AA024A","rank":"normal"}],"P27":[{"mainsnak":{"snaktype":"value","property":"P27","hash":"b6879ac933268867c108fe40cbcecde46bc4f1d7","datavalue":{"value":"10.1016/J.IJHEATMASSTRANSFER.2010.01.018","type":"string"},"datatype":"external-id"},"type":"statement","id":"Q974890$463D36F4-6CF8-4878-BF6E-491C77E65CB8","rank":"normal"}],"P1643":[{"mainsnak":{"snaktype":"value","property":"P1643","hash":"422a6872a68985a0d35a1d346745160f92b65045","datavalue":{"value":{"entity-type":"item","numeric-id":3573219,"id":"Q3573219"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"c8eabefed27b2b85fd330953b49f20bd5fbdf7da","datavalue":{"value":{"amount":"+0.7181042432785034","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q974890$D49E4BA5-1656-4908-8E2F-44E2DD99BF84","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"f57b8b3ccfa84c247f39a5afbdd07d8ba372cafe","datavalue":{"value":{"entity-type":"item","numeric-id":4582378,"id":"Q4582378"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"7be117f1647d6259a1520b77bf78d4566ff8c3ef","datavalue":{"value":{"amount":"+0.7150416374206543","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q974890$C64833D8-F30E-446B-B99C-63F24B5594BB","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"565545560f4e45890bc7e341c689a646903d648c","datavalue":{"value":{"entity-type":"item","numeric-id":695428,"id":"Q695428"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"59fb7f43926da479a511cf4a478412bd9cce7081","datavalue":{"value":{"amount":"+0.7060067653656006","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q974890$ABD8EAE2-CF4C-422A-B679-C5D45B86BE56","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"032b410f35c420344e155ce6d7aa8d29f3304397","datavalue":{"value":{"entity-type":"item","numeric-id":1646921,"id":"Q1646921"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"d379b6033f0456db15a634b9540c29477e3e65a0","datavalue":{"value":{"amount":"+0.7023845314979553","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q974890$12DDE13F-078D-43F2-A421-025D665F9085","rank":"normal"},{"mainsnak":{"snaktype":"value","property":"P1643","hash":"937b742a3b25d5e87c2246d7957777d0d717cbd0","datavalue":{"value":{"entity-type":"item","numeric-id":1777691,"id":"Q1777691"},"type":"wikibase-entityid"},"datatype":"wikibase-item"},"type":"statement","qualifiers":{"P1659":[{"snaktype":"value","property":"P1659","hash":"f4a7fb58f98d776534e2068bf9be20bbb04546c9","datavalue":{"value":{"amount":"+0.6919746994972229","unit":"1"},"type":"quantity"},"datatype":"quantity"}],"P1660":[{"snaktype":"value","property":"P1660","hash":"a327a09ea0305e98d5cf33bd4036320e19f2aed0","datavalue":{"value":{"entity-type":"item","numeric-id":6821328,"id":"Q6821328"},"type":"wikibase-entityid"},"datatype":"wikibase-item"}]},"qualifiers-order":["P1659","P1660"],"id":"Q974890$270DAEEA-1148-4A6E-B33A-4BDD37952C3A","rank":"normal"}]},"sitelinks":{"mardi":{"site":"mardi","title":"Development of a new simulation model of spin coating process and its application to optimize the 450 mm wafer coating process","badges":[],"url":"https://portal.mardi4nfdi.de/wiki/Development_of_a_new_simulation_model_of_spin_coating_process_and_its_application_to_optimize_the_450_mm_wafer_coating_process"}}}}}