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Revision as of 03:53, 5 March 2024

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Terminal iterative learning control with an application to RTPCVD thickness control
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    Terminal iterative learning control with an application to RTPCVD thickness control (English)
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    7 December 1999
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    iterative learning control
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    convergence analysis
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    high-order scheme
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    tracking control
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    terminal output tracking
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    discrete-time linear systems
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    rapid thermal processing
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    RTPCVD
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