The nonlinear electrostatic behavior for shaped electrode actuators (Q986238): Difference between revisions
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Revision as of 19:41, 19 March 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | The nonlinear electrostatic behavior for shaped electrode actuators |
scientific article |
Statements
The nonlinear electrostatic behavior for shaped electrode actuators (English)
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11 August 2010
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actuator
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curved electrode
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electrostatic
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large deflection
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MEMS
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differential quadrature method
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