On the partial differential equations of electrostatic MEMS devices. II: Dynamic case (Q927374): Difference between revisions
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Latest revision as of 20:13, 19 March 2024
scientific article
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English | On the partial differential equations of electrostatic MEMS devices. II: Dynamic case |
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On the partial differential equations of electrostatic MEMS devices. II: Dynamic case (English)
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6 June 2008
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global convergence
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touchdown points
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touchdown time
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micro-electromechanical system
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