A microbeam bending method for studying stress-strain relations for metal thin films on silicon substrates (Q850043): Difference between revisions
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| Property / author: William D. Nix / rank | |||
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| Property / MaRDI profile type: MaRDI publication profile / rank | |||
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| Property / full work available at URL: https://doi.org/10.1016/j.jmps.2004.08.007 / rank | |||
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Latest revision as of 22:52, 24 June 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A microbeam bending method for studying stress-strain relations for metal thin films on silicon substrates |
scientific article |
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A microbeam bending method for studying stress-strain relations for metal thin films on silicon substrates (English)
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15 November 2006
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thin films
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plasticity
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small-scale yielding
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strain hardening
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MEMS
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