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Property / Mathematics Subject Classification ID
 
Property / Mathematics Subject Classification ID: 74F15 / rank
 
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Property / Mathematics Subject Classification ID
 
Property / Mathematics Subject Classification ID: 74S05 / rank
 
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Property / zbMATH DE Number
 
Property / zbMATH DE Number: 6646762 / rank
 
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MEMS
Property / zbMATH Keywords: MEMS / rank
 
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micro-systems
Property / zbMATH Keywords: micro-systems / rank
 
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spontaneous adhesion
Property / zbMATH Keywords: spontaneous adhesion / rank
 
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stiction
Property / zbMATH Keywords: stiction / rank
 
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capillary forces
Property / zbMATH Keywords: capillary forces / rank
 
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Van der Waals forces
Property / zbMATH Keywords: Van der Waals forces / rank
 
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rough surfaces
Property / zbMATH Keywords: rough surfaces / rank
 
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FE simulations
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Property / full work available at URL: https://doi.org/10.1016/j.euromechsol.2012.11.008 / rank
 
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Property / cites work: On the geometry of slip and spin in finite plastic deformation / rank
 
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Property / cites work
 
Property / cites work: Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems / rank
 
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Latest revision as of 21:18, 12 July 2024

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Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems
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    Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems (English)
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    2 November 2016
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    MEMS
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    micro-systems
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    spontaneous adhesion
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    stiction
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    capillary forces
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    Van der Waals forces
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    rough surfaces
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    FE simulations
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