Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems (Q335195): Difference between revisions

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Latest revision as of 21:18, 12 July 2024

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Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems
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    Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems (English)
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    2 November 2016
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    MEMS
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    micro-systems
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    spontaneous adhesion
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    stiction
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    capillary forces
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    Van der Waals forces
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    rough surfaces
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    FE simulations
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