A cellular automaton methodology for the simulation of integrated circuit fabrication processes (Q4788304): Difference between revisions
From MaRDI portal
Created a new Item |
Set OpenAlex properties. |
||
| (3 intermediate revisions by 3 users not shown) | |||
| Property / MaRDI profile type | |||
| Property / MaRDI profile type: MaRDI publication profile / rank | |||
Normal rank | |||
| Property / Wikidata QID | |||
| Property / Wikidata QID: Q58841218 / rank | |||
Normal rank | |||
| Property / full work available at URL | |||
| Property / full work available at URL: https://doi.org/10.1016/s0167-739x(01)00061-9 / rank | |||
Normal rank | |||
| Property / OpenAlex ID | |||
| Property / OpenAlex ID: W2017817656 / rank | |||
Normal rank | |||
| links / mardi / name | links / mardi / name | ||
Latest revision as of 09:21, 30 July 2024
scientific article; zbMATH DE number 1856271
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A cellular automaton methodology for the simulation of integrated circuit fabrication processes |
scientific article; zbMATH DE number 1856271 |
Statements
A cellular automaton methodology for the simulation of integrated circuit fabrication processes (English)
0 references
21 January 2003
0 references
Cellular automata
0 references
Simulation
0 references
Modelling
0 references
