Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method (Q259298): Difference between revisions

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-.1007/s10598-015-9303-0
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@@ Property / cites work @@
+Method of integral equations in the spectral domain for the analysis of plane defects of a substrate
+Normal rank
@@ Property / cites work @@
+Analysis of inhomogeneities on wafers by the integral transform method
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@@ Property / cites work @@
+Principles of Optics
@@ Property / cites work: Principles of Optics / rank @@
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@@ Property / cites work @@
+Slot Coupling of Rectangular and Spherical Wave Guides
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@@ Property / DOI @@
+.1007/S10598-015-9303-0
@@ Property / DOI: 10.1007/S10598-015-9303-0 / rank @@
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+Publication:259298