A fast boundary-finite element approach for estimating anchor losses in micro-electro-mechanical system resonators (Q2247314): Difference between revisions

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Property / DOI: 10.1016/j.apm.2021.04.002 / rank
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Property / author: Luca Desiderio / rank
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Property / author: Patrick Fedeli / rank
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Property / author: Attilio Frangi / rank
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Property / author: Luca Desiderio / rank
 
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Property / author: Attilio Frangi / rank
 
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Property / full work available at URL: https://doi.org/10.1016/j.apm.2021.04.002 / rank
 
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Property / OpenAlex ID: W3157978375 / rank
 
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Property / cites work
 
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Latest revision as of 11:49, 28 December 2024

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A fast boundary-finite element approach for estimating anchor losses in micro-electro-mechanical system resonators
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    A fast boundary-finite element approach for estimating anchor losses in micro-electro-mechanical system resonators (English)
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    17 November 2021
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    frequency-domain boundary element method
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    finite element method
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    micro-electro-mechanical system resonator
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    anchor losses
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    wave dissipation
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    \(\mathcal{H}\)-matrix
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