Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives (Q4266649): Difference between revisions

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Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives
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Property / author: Subrata Mukherjee / rank
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Property / author: Subrata Mukherjee / rank
 
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Property / OpenAlex ID: W2067695573 / rank
 
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Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives (English)
Property / title: Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives (English) / rank
 
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Latest revision as of 09:50, 30 July 2024

scientific article; zbMATH DE number 1342709
Language Label Description Also known as
English
Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives
scientific article; zbMATH DE number 1342709

    Statements

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    25 January 2001
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    exterior indirect boundary element method
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    actuators with longest range of travel
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    optimal shape design
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    three-dimensional micro-electro-mechanical systems
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    direct simulation
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    direct differentiation
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    NAG package
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    inverse design
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    force profiles
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    comb drive
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    shape motors
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    Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives (English)
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    Identifiers