Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives (Q4266649): Difference between revisions
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Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives | |||
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Property / author: Subrata Mukherjee / rank | |||
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Property / author: Subrata Mukherjee / rank | |||
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Property / MaRDI profile type: MaRDI publication profile / rank | |||
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Property / OpenAlex ID: W2067695573 / rank | |||
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Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives (English) | |||
Property / title: Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives (English) / rank | |||
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Latest revision as of 09:50, 30 July 2024
scientific article; zbMATH DE number 1342709
Language | Label | Description | Also known as |
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English | Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives |
scientific article; zbMATH DE number 1342709 |
Statements
25 January 2001
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exterior indirect boundary element method
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actuators with longest range of travel
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optimal shape design
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three-dimensional micro-electro-mechanical systems
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direct simulation
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direct differentiation
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NAG package
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inverse design
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force profiles
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comb drive
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shape motors
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Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives (English)
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