The nonlinear electrostatic behavior for shaped electrode actuators (Q986238): Difference between revisions
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| Property / DOI: 10.1016/j.ijmecsci.2005.04.006 / rank | |||
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Latest revision as of 11:29, 10 December 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | The nonlinear electrostatic behavior for shaped electrode actuators |
scientific article |
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The nonlinear electrostatic behavior for shaped electrode actuators (English)
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11 August 2010
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actuator
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curved electrode
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electrostatic
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large deflection
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MEMS
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differential quadrature method
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