Impact dynamics of MEMS switches (Q979394): Difference between revisions
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| Property / DOI: 10.1007/s11071-009-9598-5 / rank | |||
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| Property / cites work: Nonlinear dynamics of an electrically driven impact microactuator / rank | |||
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Latest revision as of 11:00, 10 December 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Impact dynamics of MEMS switches |
scientific article |
Statements
Impact dynamics of MEMS switches (English)
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28 June 2010
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MEMS switches
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impact dynamics
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squeeze film damping
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