Terminal iterative learning control with an application to RTPCVD thickness control (Q1307121): Difference between revisions
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Revision as of 03:53, 5 March 2024
scientific article
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English | Terminal iterative learning control with an application to RTPCVD thickness control |
scientific article |
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Terminal iterative learning control with an application to RTPCVD thickness control (English)
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7 December 1999
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iterative learning control
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convergence analysis
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high-order scheme
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tracking control
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terminal output tracking
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discrete-time linear systems
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rapid thermal processing
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RTPCVD
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