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Effects of Nonlinearities on the Steady State Dynamic Behavior of Electric Actuated Microcantilever-based Resonators
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    Effects of Nonlinearities on the Steady State Dynamic Behavior of Electric Actuated Microcantilever-based Resonators (English)
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    8 October 2013
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    MEMS
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    microresonator
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    acceleration sensors
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    parametric resonance
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    stability diagram
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    nonlinear Mathieu equation
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