A hybrid finite element strategy for the simulation of MEMS structures (Q2952899): Difference between revisions
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Revision as of 10:07, 5 March 2024
scientific article
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English | A hybrid finite element strategy for the simulation of MEMS structures |
scientific article |
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A hybrid finite element strategy for the simulation of MEMS structures (English)
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30 December 2016
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hybrid FEM
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monolithic
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electro-elasticity
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coupled structure-electrostatic
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MEMS
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dynamic pull-in
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transient analysis
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