Kinetic analysis of surface roughness in a microchannel (Q2446512): Difference between revisions
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scientific article
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English | Kinetic analysis of surface roughness in a microchannel |
scientific article |
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Kinetic analysis of surface roughness in a microchannel (English)
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17 April 2014
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kinetic model equation
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MEMS
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roughness effect
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compressibility effect
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rarefied gas
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