Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems (Q335195): Difference between revisions
From MaRDI portal
Created a new Item |
Changed an Item |
||
Property / Mathematics Subject Classification ID | |||
Property / Mathematics Subject Classification ID: 74F15 / rank | |||
Normal rank | |||
Property / Mathematics Subject Classification ID | |||
Property / Mathematics Subject Classification ID: 74S05 / rank | |||
Normal rank | |||
Property / zbMATH DE Number | |||
Property / zbMATH DE Number: 6646762 / rank | |||
Normal rank | |||
Property / zbMATH Keywords | |||
MEMS | |||
Property / zbMATH Keywords: MEMS / rank | |||
Normal rank | |||
Property / zbMATH Keywords | |||
micro-systems | |||
Property / zbMATH Keywords: micro-systems / rank | |||
Normal rank | |||
Property / zbMATH Keywords | |||
spontaneous adhesion | |||
Property / zbMATH Keywords: spontaneous adhesion / rank | |||
Normal rank | |||
Property / zbMATH Keywords | |||
stiction | |||
Property / zbMATH Keywords: stiction / rank | |||
Normal rank | |||
Property / zbMATH Keywords | |||
capillary forces | |||
Property / zbMATH Keywords: capillary forces / rank | |||
Normal rank | |||
Property / zbMATH Keywords | |||
Van der Waals forces | |||
Property / zbMATH Keywords: Van der Waals forces / rank | |||
Normal rank | |||
Property / zbMATH Keywords | |||
rough surfaces | |||
Property / zbMATH Keywords: rough surfaces / rank | |||
Normal rank | |||
Property / zbMATH Keywords | |||
FE simulations | |||
Property / zbMATH Keywords: FE simulations / rank | |||
Normal rank |
Revision as of 05:59, 28 June 2023
scientific article
Language | Label | Description | Also known as |
---|---|---|---|
English | Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems |
scientific article |
Statements
Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems (English)
0 references
2 November 2016
0 references
MEMS
0 references
micro-systems
0 references
spontaneous adhesion
0 references
stiction
0 references
capillary forces
0 references
Van der Waals forces
0 references
rough surfaces
0 references
FE simulations
0 references