Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations (Q363712): Difference between revisions
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| Property / author | |||
| Property / author: M. Dambrine / rank | |||
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| Property / Mathematics Subject Classification ID: 76X05 / rank | |||
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| Property / zbMATH DE Number | |||
| Property / zbMATH DE Number: 6205578 / rank | |||
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PVD | |||
| Property / zbMATH Keywords: PVD / rank | |||
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glow discharge | |||
| Property / zbMATH Keywords: glow discharge / rank | |||
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surface coating | |||
| Property / zbMATH Keywords: surface coating / rank | |||
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plasma | |||
| Property / zbMATH Keywords: plasma / rank | |||
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drift-diffusion | |||
| Property / zbMATH Keywords: drift-diffusion / rank | |||
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Revision as of 12:11, 28 June 2023
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations |
scientific article |
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Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations (English)
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5 September 2013
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PVD
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glow discharge
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surface coating
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plasma
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drift-diffusion
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