Effects of axial and residual stresses on thermoelastic damping in capacitive micro-beam resonators (Q544931): Difference between revisions
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scientific article
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English | Effects of axial and residual stresses on thermoelastic damping in capacitive micro-beam resonators |
scientific article |
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Effects of axial and residual stresses on thermoelastic damping in capacitive micro-beam resonators (English)
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16 June 2011
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