Modeling and analysis of electrostatic MEMS filters (Q979402): Difference between revisions
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scientific article
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English | Modeling and analysis of electrostatic MEMS filters |
scientific article |
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Modeling and analysis of electrostatic MEMS filters (English)
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28 June 2010
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filters
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modeling
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nonlinearities
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resonance
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discretization
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capacitance transducers
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localization
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