Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors (Q1877236): Difference between revisions
From MaRDI portal
Created a new Item |
Added link to MaRDI item. |
||
| links / mardi / name | links / mardi / name | ||
Revision as of 11:48, 1 February 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors |
scientific article |
Statements
Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors (English)
0 references
16 August 2004
0 references
Dual-mixed finite elements
0 references
Hybrid finite elements
0 references
Thermal oxidation process
0 references
Semiconductor technology
0 references
Compressible and incompressible fluid mechanical problems
0 references
