Modeling of the ground plane in electrostatic BEM analysis of MEMS and NEMS (Q1958242): Difference between revisions
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Revision as of 04:53, 11 February 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Modeling of the ground plane in electrostatic BEM analysis of MEMS and NEMS |
scientific article |
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Modeling of the ground plane in electrostatic BEM analysis of MEMS and NEMS (English)
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28 September 2010
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boundary element methods
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microelectromechanical systems
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nanoelectromechanical systems
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beams
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nanotubes
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modeling of ground
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