Electrostatic BEM for MEMS with thin conducting plates and shells (Q2507217): Difference between revisions
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Revision as of 04:54, 11 February 2024
scientific article
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English | Electrostatic BEM for MEMS with thin conducting plates and shells |
scientific article |
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Electrostatic BEM for MEMS with thin conducting plates and shells (English)
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10 October 2006
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boundary integral equations
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boundary element method
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singular integrals
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nearly singular integrals
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micro-electro-mechanical systems
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thin plates
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thin shells
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