A fast boundary-finite element approach for estimating anchor losses in micro-electro-mechanical system resonators (Q2247314): Difference between revisions
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Revision as of 00:18, 29 February 2024
scientific article
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| English | A fast boundary-finite element approach for estimating anchor losses in micro-electro-mechanical system resonators |
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A fast boundary-finite element approach for estimating anchor losses in micro-electro-mechanical system resonators (English)
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17 November 2021
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frequency-domain boundary element method
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finite element method
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micro-electro-mechanical system resonator
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anchor losses
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wave dissipation
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\(\mathcal{H}\)-matrix
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