Heat transfer in vacuum packaged microelectromechanical system devices (Q5303746): Difference between revisions

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Revision as of 19:44, 5 March 2024

scientific article; zbMATH DE number 5683622
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English
Heat transfer in vacuum packaged microelectromechanical system devices
scientific article; zbMATH DE number 5683622

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    Heat transfer in vacuum packaged microelectromechanical system devices (English)
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    18 March 2010
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    heat transfer
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    micromechanical devices
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    thermal management (packaging)
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