Nonlinear Analysis of MEMS Electrostatic Microactuators: Primary and Secondary Resonances of the First Mode* (Q5327585): Difference between revisions

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Revision as of 20:50, 5 March 2024

scientific article; zbMATH DE number 6196606
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English
Nonlinear Analysis of MEMS Electrostatic Microactuators: Primary and Secondary Resonances of the First Mode*
scientific article; zbMATH DE number 6196606

    Statements

    Nonlinear Analysis of MEMS Electrostatic Microactuators: Primary and Secondary Resonances of the First Mode* (English)
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    8 August 2013
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    microelectromechanical systems
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    microactuator
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    differential quadrature method
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    finite difference method
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    secondary resonance
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    simultaneous resonance
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