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Revision as of 14:16, 13 March 2024

scientific article
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The nonlinear electrostatic behavior for shaped electrode actuators
scientific article

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    The nonlinear electrostatic behavior for shaped electrode actuators (English)
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    11 August 2010
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    actuator
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    curved electrode
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    electrostatic
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    large deflection
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    MEMS
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    differential quadrature method
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