Assessment of conservative weighting scheme in simulating chemical vapour deposition with trace species (Q4447042): Difference between revisions
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Latest revision as of 19:35, 19 March 2024
scientific article; zbMATH DE number 2037678
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Assessment of conservative weighting scheme in simulating chemical vapour deposition with trace species |
scientific article; zbMATH DE number 2037678 |
Statements
Assessment of conservative weighting scheme in simulating chemical vapour deposition with trace species (English)
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3 February 2004
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LPCVD
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conservative weighting scheme
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extended conservative weighting scheme
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trace species
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reactive
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single-cell simulation
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