Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors (Q1877236): Difference between revisions
From MaRDI portal
Set profile property. |
Set OpenAlex properties. |
||
| Property / full work available at URL | |||
| Property / full work available at URL: https://doi.org/10.1016/j.cam.2003.07.004 / rank | |||
Normal rank | |||
| Property / OpenAlex ID | |||
| Property / OpenAlex ID: W1972878656 / rank | |||
Normal rank | |||
Revision as of 19:42, 19 March 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors |
scientific article |
Statements
Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors (English)
0 references
16 August 2004
0 references
Dual-mixed finite elements
0 references
Hybrid finite elements
0 references
Thermal oxidation process
0 references
Semiconductor technology
0 references
Compressible and incompressible fluid mechanical problems
0 references
